The invention relates to a
stepper for juxtaposedly pushing three or four piezoelectrics and a scanning probe
microscope body thereof, in particular to a piezoelectric locator comprising three or fourThe invention relates to a
stepper for juxtaposedly pushing three or four piezoelectrics and a scanning probe
microscope body thereof, in particular to a piezoelectric locator comprising three or foure piezoelectrics and the base can be arranged integrally, and a piezoelectric scanatron fixed on the base is coated outside the
stepper, thus a scanning probe
microscope body which can work in a smalhe piezoelectrics and the base can be arranged integrally, and a piezoelectric scanatron fixed on the base is coated outside the stepper, thus a scanning probe microscope body which can work in a small space is formed. The invention has small size, simple and firm structure, and large
working temperature zone and driving force, is suitable for various extreme physical conditions and approaches tol space is formed. The invention has small size, simple and firm structure, and large
working temperature zone and driving force, is suitable for various extreme physical conditions and approaches toan ideal stepper.an ideal stepper. piezoelectrics, a base and slide blocks, wherein the three or four piezoelectrics which are triangularly or squarely arranged and are parallel in the telescopic direction are juxtaposedly fixed and epiezoelectrics, a base and slide blocks, wherein the three or four piezoelectrics which are triangularly or squarely arranged and are parallel in the telescopic direction are juxtaposedly fixed and elevated on the base; the slide blocks which are in sliding match with the three or four piezoelectrics in the telescopic direction are provided; positive pressures which enable the slide blocks and thlevated on the base; the slide blocks which are in sliding match with the three or four piezoelectrics in the telescopic direction are provided; positive pressures which enable the slide blocks and the free ends of the piezoelectrics to be pressed are arranged in the direction vertical to the telescopic direction; in the largest breakout friction to the slide blocks, which is generated by the three free ends of the piezoelectrics to be pressed are arranged in the direction vertical to the telescopic direction; in the largest breakout friction to the slide blocks, which is generated by the three or four positive pressures, any largest breakout friction is smaller than the sum of other two or three frictions; the slide blocks press the free ends of the piezoelectrics through elastic force; te or four positive pressures, any largest breakout friction is smaller than the sum of other two or three frictions; the slide blocks press the free ends of the piezoelectrics through elastic force; th