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A large stroke two-dimensional piezoelectric positioning stage

A positioning stage, large stroke technology, applied in piezoelectric/electrostrictive or magnetostrictive motors, electrical components, generators/motors, etc., can solve the problem of small effective stroke area, small load area, coupling error Large and other problems, to achieve the effect of increasing the available load area, achieving stiffness balance, and compact space structure

Active Publication Date: 2022-07-15
HEFEI UNIV OF TECH
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Problems solved by technology

[0006] In order to solve the problems of small stroke, small loading area, relatively small effective stroke area, and large coupling error of the above-mentioned traditional piezoelectric positioning platform, the present invention provides a two-dimensional piezoelectric positioning platform with large stroke

Method used

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  • A large stroke two-dimensional piezoelectric positioning stage
  • A large stroke two-dimensional piezoelectric positioning stage
  • A large stroke two-dimensional piezoelectric positioning stage

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Embodiment Construction

[0039] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0040] see figure 1 , a large-stroke two-dimensional piezoelectric positioning table includes a base plate 1, a piezoelectric positioning table 2, a loading platform 3 and a preloading mechanism. The piezoelectric positioning stage 2 is fixedly installed on the base plate 1 , and the object stage 3 is fixedly installed on the top surface of the piezoelectric positioning stage 2 . The pre-tightening mechanism includes a first pre-tigh...

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Abstract

The invention discloses a two-dimensional piezoelectric positioning stage with a large stroke and a large effective stroke area ratio, belonging to the technical field of piezoelectric driving. It includes a base plate, a piezoelectric positioning platform, a loading platform and a pre-tightening mechanism; the pre-tightening mechanism includes a first pre-tightening mechanism and a second pre-tightening mechanism, which are respectively located on the corresponding sides of the piezoelectric positioning platforms of the two displacement amplification mechanisms. On the bottom plate; the piezoelectric positioning stage includes a carrier platform frame, a first displacement amplifying mechanism, a first decoupling mechanism, a second displacement amplifying mechanism and a second decoupling mechanism; the first displacement amplifying mechanism and the first decoupling mechanism are one The group realizes the displacement output of the piezoelectric positioning stage in the Y direction, and the second displacement amplifying mechanism and the second decoupling mechanism are one group to realize the displacement output of the piezoelectric positioning stage in the X direction. Through the structural design of the two displacement amplifying mechanisms, the invention makes the overall amplification ratio reach 14.4; and by adjusting the mechanical parameters of the two decoupling mechanisms, the coupling error of the piezoelectric positioning stage in the X direction and the Y direction is reduced to 0.35%.

Description

technical field [0001] The invention belongs to the technical field of piezoelectric driving, and in particular relates to a large-stroke two-dimensional piezoelectric positioning stage. Background technique [0002] Piezoelectric positioning stage is a mechanical structure that uses piezoelectric drive technology to achieve precise positioning. Using the inverse piezoelectric effect of the piezoelectric ceramics, the piezoelectric ceramics can generate tiny displacements after being excited by electricity, so as to achieve precise positioning. [0003] The current piezoelectric positioning stage can be divided into single degree of freedom and multiple degrees of freedom according to the classification of degrees of freedom, and can be divided into direct drive type and amplification type according to whether there is a displacement amplifying mechanism. Because the electrostrictive deformation of piezoelectric ceramics is usually one-thousandth of the thickness of the cer...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H02N2/04
CPCH02N2/04H02N2/043
Inventor 潘巧生汪权陈立蔚李英豪黄梓良李瑞君张连生黄强先
Owner HEFEI UNIV OF TECH
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