A large stroke two-dimensional piezoelectric positioning stage

Abstract

The invention discloses a two-dimensional piezoelectric positioning stage with a large stroke and a large effective stroke area ratio, belonging to the technical field of piezoelectric driving. It includes a base plate, a piezoelectric positioning platform, a loading platform and a pre-tightening mechanism; the pre-tightening mechanism includes a first pre-tightening mechanism and a second pre-tightening mechanism, which are respectively located on the corresponding sides of the piezoelectric positioning platforms of the two displacement amplification mechanisms. On the bottom plate; the piezoelectric positioning stage includes a carrier platform frame, a first displacement amplifying mechanism, a first decoupling mechanism, a second displacement amplifying mechanism and a second decoupling mechanism; the first displacement amplifying mechanism and the first decoupling mechanism are one The group realizes the displacement output of the piezoelectric positioning stage in the Y direction, and the second displacement amplifying mechanism and the second decoupling mechanism are one group to realize the displacement output of the piezoelectric positioning stage in the X direction. Through the structural design of the two displacement amplifying mechanisms, the invention makes the overall amplification ratio reach 14.4; and by adjusting the mechanical parameters of the two decoupling mechanisms, the coupling error of the piezoelectric positioning stage in the X direction and the Y direction is reduced to 0.35%.

Description

technical field [0001] The invention belongs to the technical field of piezoelectric driving, and in particular relates to a large-stroke two-dimensional piezoelectric positioning stage. Background technique [0002] Piezoelectric positioning stage is a mechanical structure that uses piezoelectric drive technology to achieve precise positioning. Using the inverse piezoelectric effect of the piezoelectric ceramics, the piezoelectric ceramics can generate tiny displacements after being excited by electricity, so as to achieve precise positioning. [0003] The current piezoelectric positioning stage can be divided into single degree of freedom and multiple degrees of freedom according to the classification of degrees of freedom, and can be divided into direct drive type and amplification type according to whether there is a displacement amplifying mechanism. Because the electrostrictive deformation of piezoelectric ceramics is usually one-thousandth of the thickness of the cer...

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Problems solved by technology

[0006] In order to solve the problems of small stroke, small loading area, relatively small effective stroke area, and large coupling error of the above-mentioned traditional piezoelectric positioning platform, the present invention provides a two-dimensional piezoelectric positioning platform with large stroke

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