3results about How to "Reduce coupling error" patented technology

This invention relates to a triaxial gyroscope, specifically a topological ring-shaped monolithic triaxial MEMS gyroscope chip, comprising a substrate, a resonator portion, and an electrode portion. The resonator portion includes a central anchor point bonded to the upper surface of the substrate. A resonant ring is sleeved on the outer side of the central anchor point. Four resonant squares and four U-shaped sensitive mass blocks are connected around the outer side of the resonant ring. A square sensitive mass block is connected to the inner side of each resonant square. A straight beam A and two rows of detection comb teeth A are connected to the outer side of each resonant square. Two rows of detection comb teeth B are connected to the outer side of each straight beam A. Four rows of detection comb teeth C are connected to the inner side of each U-shaped sensitive mass block. This invention effectively solves the problems of low sensitivity, poor working stability, low measurement accuracy, and large size of existing triaxial gyroscopes, and is suitable for aerospace, autonomous vehicles, intelligent robots, consumer electronics, and other fields.

The utility model relates to the technical field of MEMS gyroscopes, and discloses a low-coupling high-precision MEMS gyroscope, comprising: two drive frames distributed along a first direction; two coupling mass blocks arranged in the two drive frames respectively; orthogonal correction electrodes, four orthogonal correction electrodes being arranged on each coupling mass block; two detection mass blocks located between the two coupling mass blocks, each detection mass block being rigidly connected to a substrate along the first direction and elastically connected along a second direction; detection electrodes, two detection electrodes being arranged on each detection mass block in anti-symmetrical distribution relative to the first direction; and a first inclined U-shaped beam capable of driving the two detection mass blocks to make reverse reciprocating motion along the second direction in a detection mode. The low-coupling high-precision MEMS gyroscope disclosed by the utility model has low coupling error and high detection precision, and widens the application scenarios of the high-precision MEMS gyroscope.

The application relates to a three-axis gyroscope, in particular to a novel three-axis silicon micro gyroscope. The application solves the problems of low measuring precision and high production cost of the existing three-axis gyroscope. The novel three-axis silicon micro gyroscope comprises a glass substrate, a resonator part and an electrode part; the resonator part comprises a cylindrical center anchor point, four groups of square anchor points A and four square anchor points B; the cylindrical center anchor point, the four groups of square anchor points A and the four square anchor points B are all bonded to the upper surface of the glass substrate; the electrode part comprises four pairs of arc-shaped electrodes A, four arc-shaped electrodes B, four pairs of arc-shaped electrodes C, four arc-shaped electrodes D and four rectangular electrodes; the four pairs of arc-shaped electrodes A, the four arc-shaped electrodes B, the four pairs of arc-shaped electrodes C and the four arc-shaped electrodes D are all bonded to the upper surface of the glass substrate; and the four rectangular electrodes are all sputtered on the upper surface of the glass substrate. The application is suitable for high-precision and high-tech fields such as military navigation and deep space exploration.