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45results about How to "Reduce coupling error" patented technology

Six-dimensional force and torque sensor for measuring large force and small torque of large mechanical arm

The invention discloses a six-dimensional force and torque sensor for measuring large force and small torque of a large mechanical arm. The six-dimensional force and torque sensor comprises a center shaft, a force sensitive element, a base and a strain gage component, wherein the force sensitive element is fixedly connected to the base; the center shaft penetrates through the force sensitive element and the base; the center shaft is in interference fit with the force sensitive element; the strain gage component is attached to the force sensitive element; the force sensitive element comprises four elastic main beams, four elastic auxiliary beams, a regularly octagonal center shaft platform, four fixing platforms, four main floating beams and four auxiliary floating beams; the strain gage component comprises a first strain gage group and a second strain gage group; two opposite elastic main beams in the four elastic main beams are respectively coated with the first strain gage group, and the other two elastic main beams are respectively coated with the second strain gage group; and the center shaft is in interference fit with a through hole of the center shaft platform. The six-dimensional force and torque sensor can improve the rigidity of measuring the force, and can also slightly improve the rigidity of measuring torque.
Owner:SOUTHEAST UNIV

Lever-amplification-principle-based dual-shaft full-decoupling silicone micro-resonator type accelerometer

The invention discloses a lever-amplification-principle-based dual-shaft full-decoupling silicone micro-resonator type accelerometer comprising an upper layer and a lower layer. A mechanical structure of a silicone micro accelerometer is arranged at the upper layer and a glass substrate laid with a signal lead is arranged at the lower layer. The mechanical structure is formed by a sensing mass, a common anchor point, lever amplifier mechanisms, decoupling beams, and resonators; one end of one decoupling beam is connected with the sensing mass and the other end is connected with the common anchor point by the lever amplifier mechanisms; and the inertia force applied to the sensing mass is magnified by the lever amplifier mechanisms and then is transmitted to the resonators. The resonators consist of resonance beams, comb racks, movable combs, fixed drive combs, fixed drive feedback combs, and fixed anchor points. According to the silicone micro-resonator type accelerometer, accelerated speed detection at two directions in a plane can be realized; and the frequency is used as an output. The accelerometer has advantages of small size, high integration degree, small coupling error, high sensitivity, and excellent anti-interference capability and the like.
Owner:SOUTHEAST UNIV

Quaternion ESPRIT parameter estimation method for magnetic dipole pair array

A quaternion ESPRIT parameter estimation method for a magnetic dipole pair array comprises the following steps: sampling output signals of an electromagnetic vector sensor array to obtain a first set of sampling data, and synchronously sampling output signals after a delay of delta T to obtain a second set of sampling data; constructing a first received quaternion data matrix, a second received quaternion data matrix and full-array received data; calculating the autocorrelation matrix of the full-array received data, and performing quaternion feature decomposition on the autocorrelation matrix to obtain array steering vector estimated values corresponding to the first set of sampling data and the second set of sampling data and an array steering vector matrix estimated value corresponding to the full data; obtaining the estimated value of the signal arrival angle based on the array steering vector estimated value corresponding to the first set of sampling data; and reconstructing an array steering vector estimated value of an electric dipole sub-array and an array steering vector estimated value of a magnetic dipole sub-array in the Z-axis direction, and obtaining estimated values of signal polarization parameters according to the rotational invariance relation between sub-array steering vectors.
Owner:深圳万知达科技有限公司

Real-time feedback control method for printing precision of 3D printer

The invention discloses a real-time feedback control method for the printing precision of a 3D printer. The method is implemented in the two parts: the first part, the positioning error of a printer machine is reduced through a feedback control system of the printer machine; and the second part, the forming error of a concrete object is reduced through a feedback adjusting system between the printer and a printed object, wherein the second part is a two-stage positioning method, the first stage is a horizontal relative position feedback adjusting system, and the second stage is a vertical relative position feedback adjusting system. The two stages are matched with each other, so that accurate adjustment and positioning between a printing nozzle and the printing object are realized. The twosystems are matched with each other to form a real-time feedback control system for the nozzle position, the coupling error between the printer and the printing object can be effectively reduced, theprinting precision of the 3D printer is improved, and the printing effect is enriched.
Owner:SOUTHEAST UNIV

Multi-parameter joint estimation method of quaternion for double L-shaped tensile orthogonal couple array

ActiveCN104933290AHigh precisionQuaternion vector properties are goodSpecial data processing applicationsCouplingPhase difference
A multi-parameter joint estimation method for a double L-shaped electromagnetic vector sensor array is disclosed. The method comprises: receiving, by an array, K absolutely polarized unit power electromagnetic wave incident signals, and performing twice sampling on data received by an electromagnetic vector sensor; superposing the two groups of sampled data respectively according to X-coordinate direction electric dipoles and Y-coordinate direction electric dipoles in the same array element to form receive quaternion data of the entire array; calculating an autocorrelation matrix of the receive quaternion data of the entire array, and performing quaternion characteristic analysis to obtain an estimated value of an array guide vector, an array guide vector estimated value upon delaying, and an estimated value of a whole data array guide vector; by using the shift invariant relationship, obtaining directional cosine estimated values of the Kth incident signal in the X-coordinate and the Y-coordinate, and obtaining an estimated value of a two-dimensional arrival angle; and by using the rotation invariant relationship between array guide vectors of the sub-matrix, obtaining an estimated value of an auxiliary polarization angle and an estimated value of an polarization phase difference. The method according to the present invention is capable of protecting the vector features of the quaternion, and has an even smaller coupling error.
Owner:TONGZHOU XINGCHEN MACHINERY

Quaternion ESPRIT parameter estimation method of sparse circular sound vector sensor array

ActiveCN106249225APreserve vector propertiesEmbodying OrthogonalityWave based measurement systemsQuaternionEstimation methods
Provided is a quaternion ESPRIT parameter estimation method of a sparse circular sound vector sensor array. The array receives K far-field narrowband sound signals of different frequencies and independent from one another, according to each of two groups of complex-domain data received by the array, the same sound pressure of sampling data of the array is overlapped with vibration speed data in three directions vertical to one another to form quaternion linear sampling data; characteristic decomposition and related operation are carried out on an autocorrelation matrix of full-array reception data to obtain estimated values of array guiding vectors; the estimated values of the array guiding vectors are used to reconstruct subarray guiding vectors, and the rotation-invariant relation among the subarray guiding vectors is used to obtain a roughly estimated value of the cosine in the signal direction; and the roughly estimated value of the cosine in the signal direction is used to determine a phase period fuzzy number of a spatial domain guiding vector, and a least square method is used to obtain an accurate estimated value of the arrival angle of the signal. According to the invention, orthogonal feature among components of the sound vector sensors is maintained, error robustness of a model is higher, and the problem of phase fuzziness of the sparse vector sensor circular array is solved.
Owner:HARBIN ZHONGDA KERUI ELECTRIC POWER

Inertial attitude measurement apparatus for high-speed rotating carrier

The invention discloses an inertial attitude measurement apparatus for a high-speed rotating carrier, and belongs to the technical field of an inertial attitude measurement apparatus. The apparatus includes a gas gyroscope used for measuring the angular rate in a rolling axis direction and two rate gyroscopes used for measurement in yawing and pitching directions. The apparatus can measure the roll angle, yaw angle and pitch angle and triaxial angular velocity of a high-speed rotating carrier in real time. The roll angle measurement error of the apparatus only depends on the drift rate of theroll gas gyroscope and isn't fast diverged with time. The attitude is accurately measured when the carrier rotates at a high speed. The apparatus is simple in structure and manufacture process, low incost, small in size, and good in crypticity and reliability. The apparatus works, depending on the devices of itself and can work without limitation by meteorological conditions.
Owner:西安现代控制技术研究所

Triaxial decoupling self-zero-setting fluxgate magnetometer zero point measurement circuit

ActiveCN106324542AImprove energy efficiencyReduce incentive attack consumptionElectrical measurementsPhysicsConstant voltage
The invention discloses a triaxial decoupling self-zero-setting fluxgate magnetometer zero point measurement circuit, and the circuit employs a bipolar intermittent pulse excitation unit composed of low-power-consumption temperature control crystal oscillator to carry out the excitation of an iron core. The circuit employs the temperature control crystal oscillator to stabilize the work frequency, enables the iron core to be demagnetized in real time in a mode of bipolar excitation, and employs an intermittent pulse voltage excitation waveform to greatly reduce the power consumption. The circuit controls a constant voltage source to carry out the excitation of the iron core through a low-resistance switch, and greatly improves the energy utilization efficiency of the excitation unit. The circuit provided by the invention employs a weak coupling mode to install a triaxial magnetic probe, reduces the triaxial coupling error through the optimization of the relative position of the triaxial magnetic probe, employs a zero point automatic measurement circuit, can carry out the programming control to achieve the online detection of a circuit zero point, and can be used in the fields of magnetic field measurement and magnetic object detection.
Owner:NAVAL UNIV OF ENG PLA

High-bandwidth two-freedom-degree parallel flexible precision positioning platform

The invention discloses a high-bandwidth two-freedom-degree parallel flexible precision positioning platform. The high-bandwidth two-freedom-degree parallel flexible precision positioning platform comprises a fixed machine frame, four sets of flexible units, a terminal end moving platform, two piezoelectric stacking driving devices, two high-bandwidth capacitance sensors, and two sets of improvedwedge-type pre-tightening devices, wherein a central hollow part and two offset hollow parts are arranged on the fixed machine frame; the four sets of flexible units are connected to and arranged on the inner wall of the central hollow part in a pair opposite manner and in a crossed symmetrical mode; the terminal end moving platform is located at the center of the central hollow part and connectedwith the flexible hinge end of each flexible unit to provide the loading condition for the platform; the two piezoelectric stacking driving devices are respectively arranged in the two offset hollowparts, and the front ends of the two piezoelectric stacking driving devices act on the back end of the corresponding flexible units to provide the high-frequency driving force for the terminal end moving platform; the high-bandwidth capacitance sensors are used for obtaining the displacement information of the terminal end moving platform in the X and Y directions; and the two sets of improved wedge-type pre-tightening devices are fixed on the fixed machine frame and used for pre-tightening the two piezoelectric stacking driving devices. The high-bandwidth two-freedom-degree parallel flexibleprecision positioning platform has the characteristics of being high in bandwidth, high in precision and low in coupling, and the problem of the slow response and the poor coupling performance of thepositioning platform at the present can be solved.
Owner:SOUTH CHINA UNIV OF TECH

Parallel mechanism modal space control method suitable for ophthalmic microsurgery

The invention discloses a six-degrees-of-freedom parallel mechanism modal space control method suitable for parallel computing. The problem of modal decoupling matrix solving of a parallel mechanism in global motion is converted into the problem of zero values of a nonlinear system of equations; on the basis, a modal frequency and characteristic value iterative numerical algorithm is constructed based on the Newton iterative algorithm; and the iterative algorithm is high in convergence rate, few in iterative time and suitable for multi-core processor parallel computing. A global modal space controller constructed by adopting the iterative algorithm not only solves a modal transition problem in large overall motion of the six-degrees-of-freedom parallel mechanism but also improves computational efficiency of the controller greatly.
Owner:成琼 +1

Self-decoupling micro-gyroscope device for nano-optical grating

The invention relates to a self-decoupling micro-gyroscope device for a nano-optical grating. The self-decoupling micro-gyroscope device mainly structurally comprises a lower base plate, a bonding frame body, an upper base plate, a driving magnet body, a detection magnet body, fixed optical gratings, a driving mass block, detection mass blocks, elastic beams and movable optical gratings, wherein the rectangular driving magnet body, the detection magnet body and the two fixed optical gratings are symmetrically arranged on the lower base plate, the bonding frame body is fixedly connected with the lower base plate and the upper base plate, driving mechanisms, detection mechanisms, a driving mass block and the detection mass block are arranged on the upper base plate, and the movable optical gratings are arranged in the center of the detection mass block. The device is novel in structure, has a self-decoupling effect, is used for detecting a weak Coriolis force by virtue of a nano-optical grating vector optical effect and has the advantages that the sensitivity is high, the precision is high, the noise is low, the temperature influence is avoided, the detection data are accurate and the reliability is good.
Owner:ZHONGBEI UNIV

Visual axis stabilizing method for servo stabilizing system of mobile laser communication equipment

The invention discloses a visual axis stabilizing method for a servo stabilizing system of mobile laser communication equipment, and the method is characterized in that the method comprises the following steps: 1) installing, correcting and optimizing a gyroscope; 2) executing a CCD centroid algorithm optimization process; 3) executing a same-direction small value rapid convergence process. According to the method, the visual axis of the system can be stabilized, the linearity of the system can be improved, the coupling error between all shaft systems of the system can be reduced, and the disturbance resistance and the tracking precision of the system can be enhanced.
Owner:NO 34 RES INST OF CHINA ELECTRONICS TECH GRP

Six-dimensional force and torque sensor for measuring large force and small torque of large mechanical arm

The invention discloses a six-dimensional force and torque sensor for measuring large force and small torque of a large mechanical arm. The six-dimensional force and torque sensor comprises a center shaft, a force sensitive element, a base and a strain gage component, wherein the force sensitive element is fixedly connected to the base; the center shaft penetrates through the force sensitive element and the base; the center shaft is in interference fit with the force sensitive element; the strain gage component is attached to the force sensitive element; the force sensitive element comprises four elastic main beams, four elastic auxiliary beams, a regularly octagonal center shaft platform, four fixing platforms, four main floating beams and four auxiliary floating beams; the strain gage component comprises a first strain gage group and a second strain gage group; two opposite elastic main beams in the four elastic main beams are respectively coated with the first strain gage group, and the other two elastic main beams are respectively coated with the second strain gage group; and the center shaft is in interference fit with a through hole of the center shaft platform. The six-dimensional force and torque sensor can improve the rigidity of measuring the force, and can also slightly improve the rigidity of measuring torque.
Owner:SOUTHEAST UNIV

Large-angle high-resolution touch sensing device and method based on bionic compound eyes

ActiveCN112129438ABlock astigmatismHas light transmission propertiesForce measurement by measuring optical property variationTouch SensesEngineering
The invention discloses a large-angle high-resolution touch sensing device and method based on bionic compound eyes. The touch sensing device comprises a curved surface light waveguide plate, a compound eye array, masks, an optical fiber light cone, an LED light source array, an LED light source fixing plate array, an LED light source fixing support array, a detector and a base, wherein the detector and the LED light source fixing support array are installed on the upper surface of the base, the detector is coupled with the tail end of the optical fiber light cone, the curved surface light waveguide plate and the compound eye array are concentrically installed above the top end of the optical fiber light cone, and the center of the sphere and the center of the detector are located on the same vertical line; and the positions between all sub-eyes of the compound eye array are filled with the masks, the LED light source fixing plate array is installed at the top of the LED light source fixing support array, and the LED light source array is placed on the LED light source fixing plate array. The angle interval between LED light sources in the LED light source array is 6 degrees.
Owner:TIANJIN UNIV

Two-dimensional ultrasonic vibration platform for micro-nano machining

A two-dimensional ultrasonic vibration platform for micro-nano machining comprises a rectangular annular base body. A motion platform is arranged at the center position of a hollow part of the rectangular frame base body. Each of the inner side edges, corresponding to the motion platform, of four frames of the rectangular frame base body is provided with a piezoelectric ceramic driver. A decoupling gasket composed of transverse isotropy materials is arranged between each piezoelectric ceramic driver and the motion platform. The four frames, corresponding to the piezoelectric ceramic drivers, of the rectangular frame base body are provided with threaded-connection pre-tightening bolts penetrating through the frames. The pre-tightening bolts are used for conducting adjustable pre-tighteningon contact connection among the motion platform, the decoupling gaskets and the piezoelectric ceramic drivers. The whole system has enough rigidity and stability. Ultrasonic vibration in the X / Y direction is jointly controlled by two piezoelectric ceramics in the respective direction, and vibration precision and repeatability are guaranteed. Special materials are used for decoupling vibration in the X / Y direction, and the coupling error of ultrasonic vibration in the non-work direction is reduced.
Owner:TIANJIN UNIV

3-PRR micro-displacement platform based on symmetrical variable cross-section compliant mechanism

InactiveCN103030103BAvoid exposure to incomplete situationsHigh transmission precisionMicrostructural devicesCompliant mechanismEngineering
The invention discloses a 3-PRR micro-displacement platform based on a symmetrical variable cross-section compliant mechanism, wherein three micro-displacement driving devices are all mounted on a fixed platform; three branch chains connecting a movable platform with the fixed platform are arranged evenly; and in each branch chain, a lever amplification mechanism is connected with the fixed platform through a flexible hinge and a symmetrical trapezoidal compliant mechanism is connected with the lever amplification mechanism through the flexible hinge. One end of the symmetrical folding leaf spring type compliant mechanism is connected with the lever amplification mechanism through the flexible hinge, while the other of the symmetrical folding leaf spring type compliant mechanism is connected with a rigid connecting rod through the flexible hinge; the rigid connecting rod is connected with the movable platform through the flexible hinge; and the movable platform is capable of realizing planar three-freedom degree micro-motion. The symmetrical trapezoidal compliant mechanism of the 3-PRR micro-displacement platform is capable of avoiding incomplete contact of the driving devices when the elastic resistance is as low as possible; as a result, the motion accuracy is improved; and due to the amplification function of the lever amplification mechanism of the 3-PRR micro-displacement platform and the low resistance feature of the symmetrical folding leaf spring type compliant mechanism, large stroke output of the micro-displacement platform can be realized.
Owner:SHANDONG UNIV OF TECH

Singlechip three-axis MEMS gyroscope based on wheel-ring mode

The invention relates to a three-axis gyroscope, in particular to a singlechip three-axis MEMS gyroscope based on a wheel-ring mode. The problem that an existing three-axis gyroscope is low in measurement precision and high in production cost is solved. The singlechip three-axis MEMS gyroscope based on the wheel-ring mode comprises a glass substrate, a driving structure, an x-axis sensitive structure, a y-axis sensitive structure and a z-axis sensitive structure; the driving structure comprises a cylindrical central anchor body, a ring-shaped driving mass block, four straight elastic supporting cantilevers, eight movable driving comb teeth and eight pairs of fixed driving comb teeth; the x-axis sensitive structure comprises a first ring-shaped sensitive mass block, two first triangular elastic supporting cantilevers and two first arc-shaped electrodes; and the y-axis sensitive structure comprises a second ring-shaped sensitive mass block, two second triangular elastic supporting cantilevers and two second arc-shaped electrodes. The singlechip three-axis MEMS gyroscope based on the wheel-ring mode is suitable for the high-grade fields of military navigation and deep space exploration.
Owner:ZHONGBEI UNIV

Three-dimensional force measurement platform capable of laterally sliding

The invention discloses a three-dimensional force measurement platform capable of laterally sliding. The three-dimensional force measurement platform is characterized in that an airplane wheel touch side sliding mechanism is arranged on the three-dimensional force measurement platform, a first X-direction force sensor assembly, a second X-direction force sensor assembly, a first Y-direction forcesensor assembly, a second Y-direction force sensor assembly, a first Z-direction force sensor assembly, a second Z-direction force sensor assembly and a third Z-direction force sensor assembly are arranged on the three-dimensional force measurement platform, acting force lines of the first X-direction force sensor assembly and the second Z-direction force sensor assembly intersect at a point, acting force lines of the first Y-direction force sensor assembly and the first Z-direction force sensor assembly intersect at a point, acting force lines of the second X-direction force sensor assembly,the second Y-direction force sensor assembly and the third Z-direction force sensor assembly intersect at a point, a sliding plat is arranged on the airplane wheel touch side sliding mechanism by a planer needle bearing, a tension spring is arranged at a front end of the sliding plate, and Y-direction freedom degree of the sliding plate is open. The coupling error during real-time measurement andanalysis on a three-dimensional dynamic load under the same time domain is small, the measurement accuracy is high, and the three-dimensional force measurement platform can be used for various types of airplanes and unmanned aerial machines.
Owner:LANDING GEAR ADVANCED MFG

Monolithic integrated z-axis redundant three-axis gyroscope structure array

The invention relates to a three-axis gyroscope, in particular to a monolithic integrated z-axis redundant three-axis gyroscope structure array, and aims to solve the problems of low measuring accuracy and high production cost of the existing three-axis gyroscope. The monolithic integrated z-axis redundant three-axis gyroscope structure array comprises a glass substrate, a first square framework,a first driving module, an x-axis detection module, a first z-axis detection module, a first driving detection module, a second square framework, a second driving module, a y-axis detection module, asecond z-axis detection module and a second driving detection module, wherein the first driving module comprises a left longitudinal stripped movable driving polar plate, a right longitudinal strippedmovable driving polar plate, two left anchor blocks, two right anchor blocks, two left square wave elastic support suspension beams, two right square wave elastic support suspension beams, eight pairs of left fixed driving polar plates, eight pairs of right fixed driving polar plate, a left elastic decoupling suspension beam and a right elastic decoupling suspension beam. The monolithic integrated z-axis redundant three-axis gyroscope structure array is suitable for the high-grade, high-precision, advanced fields of military navigation, deep space exploration and the like.
Owner:ZHONGBEI UNIV

Multi-component force combination calibration device loading mechanism based on electric cylinder

InactiveCN112326238AAchieve aloneImplementing Combined Loading CalibrationMachine part testingBall screwElectric machinery
The invention discloses a multi-component force combination calibration device loading mechanism based on an electric cylinder, and belongs to the technical field of large mechanical measurement instruments and equipment. The mechanism comprises a lower bottom plate, a chain wheel and chain system, a driving motor, a ball screw, a stand column, a mobile platform, a hydraulic expansion sleeve, a Yloading beam, an X+ loading beam, an X- loading beam, a Y loading cylinder, an X- loading cylinder, an X+ auxiliary Y- loading cylinder, an X+ loading cylinder, an X+ auxiliary Y+ loading cylinder, anupper top plate, a Z loading cylinder, a Z auxiliary Y loading cylinder and a Z auxiliary X loading cylinder. When a tested sensor is calibrated, the sensor is fixed on the mobile platform, and the mobile platform moves up and down to adjust the Z-direction position of the sensor. According to the invention, the defects of amulti-component force calibration device loading system can be overcome,the tested sensor is continuously loaded and calibrated, the pulling direction of the tested sensor is calibrated, all components of the tested sensor are tested independently and in a combined manner, the requirement on the number of loading cylinders is lower, and the advantages of high control precision, low cost, small installation space and the like are achieved.
Owner:BEIJING CHANGCHENG INST OF METROLOGY & MEASUREMENT AVIATION IND CORP OF CHINA

High-accuracy Z-direction single-freedom-degree micro-positioning platform based on multi-stage helical structure hinge

The invention discloses a high-accuracy Z-direction single-freedom-degree micro-positioning platform based on a multi-stage helical structure hinge. The platform comprises a multi-stage helical structure hinge supporting ring, a base and a piezoelectric ceramic actuator. The multi-stage helical structure hinge supporting ring comprises an outer ring located at the periphery, a terminal platform located in the center, and a multi-stage helical structure hinge located between the outer ring and the terminal platform. The outer ring is fixedly connected to the base. The piezoelectric ceramic actuator is fixedly connected to the interior of the base. The center of the bottom of the terminal platform makes contact with the top end of the piezoelectric ceramic actuator. The piezoelectric ceramicactuator generates Z-direction displacement to drive the terminal platform to generate Z-direction displacement. By adopting the multi-stage helical structure hinge comprising the helical hinge and the round rings in a multi-stage stacking manner, the high-accuracy Z-direction single-freedom-degree micro-positioning platform based on the multi-stage helical structure hinge has the characteristicsof being high in motion accuracy, small in coupling error and compact in structure, and it is be achieved that the terminal platform can move and be located with high accuracy in the Z direction.
Owner:TIANJIN UNIV

Quaternion Esprit Parameter Estimation Method for Array of Electromagnetic Dipole Pairs

A quaternion ESPRIT parameter estimation method for a magnetic dipole pair array comprises the following steps: sampling output signals of an electromagnetic vector sensor array to obtain a first set of sampling data, and synchronously sampling output signals after a delay of delta T to obtain a second set of sampling data; constructing a first received quaternion data matrix, a second received quaternion data matrix and full-array received data; calculating the autocorrelation matrix of the full-array received data, and performing quaternion feature decomposition on the autocorrelation matrix to obtain array steering vector estimated values corresponding to the first set of sampling data and the second set of sampling data and an array steering vector matrix estimated value corresponding to the full data; obtaining the estimated value of the signal arrival angle based on the array steering vector estimated value corresponding to the first set of sampling data; and reconstructing an array steering vector estimated value of an electric dipole sub-array and an array steering vector estimated value of a magnetic dipole sub-array in the Z-axis direction, and obtaining estimated values of signal polarization parameters according to the rotational invariance relation between sub-array steering vectors.
Owner:深圳万知达科技有限公司

Two-dimensional piezoelectric positioning table with large stroke

The invention discloses a two-dimensional piezoelectric positioning table with a large stroke and a large effective stroke area ratio, and belongs to the technical field of piezoelectric driving. The two-dimensional piezoelectric positioning table comprises a bottom plate, a piezoelectric positioning table, a loading platform and a pre-tightening mechanism; the pre-tightening mechanism comprises a first pre-tightening mechanism and a second pre-tightening mechanism which are respectively arranged on the bottom plate on the corresponding side edges of the piezoelectric positioning tables of the two displacement amplification mechanisms; the piezoelectric positioning table comprises a carrying platform frame, a first displacement amplification mechanism, a first decoupling mechanism, a second displacement amplification mechanism and a second decoupling mechanism; and the first displacement amplification mechanism and the first decoupling mechanism form a group to realize the displacement output of the piezoelectric positioning table in the Y direction, and the second displacement amplification mechanism and the second decoupling mechanism form a group to realize the displacement output of the piezoelectric positioning table in the X direction. Through the structural design of the two displacement amplification mechanisms, the overall amplification ratio reaches 14.4; and by adjusting mechanical mechanism parameters of the two decoupling mechanisms, the coupling error of the piezoelectric positioning table in the X direction and the Y direction is reduced to 0.35%.
Owner:HEFEI UNIV OF TECH
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