Singlechip three-axis MEMS gyroscope based on wheel-ring mode

A gyroscope and form technology, applied in the direction of rotating gyroscope, can solve the problems of low measurement accuracy and high production cost, and achieve the effects of improving measurement accuracy, reasonable structure and ingenious design

Active Publication Date: 2019-01-08
ZHONGBEI UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In order to solve the problems of low measurement accuracy and high production cost of the existing three-axis gyroscope, the present invention provides a single-chip three-axis MEMS gyroscope based on a wheel-ring form

Method used

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  • Singlechip three-axis MEMS gyroscope based on wheel-ring mode
  • Singlechip three-axis MEMS gyroscope based on wheel-ring mode
  • Singlechip three-axis MEMS gyroscope based on wheel-ring mode

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Embodiment Construction

[0022] A monolithic three-axis MEMS gyroscope based on the wheel-ring form, including a glass substrate 1, a driving structure, an x-axis sensitive structure, a y-axis sensitive structure, and a z-axis sensitive structure;

[0023] The driving structure includes a cylindrical central anchor 201, a circular ring-shaped driving mass 202, four straight elastic support suspension beams 203, eight movable driving comb teeth 204, and eight pairs of fixed driving comb teeth 205;

[0024] The lower end surface of the cylindrical central anchor body 201 is fixed to the upper surface of the glass substrate 1; the annular driving mass 202 is sleeved on the outside of the cylindrical central anchor body 201, and the axis of the annular driving mass 202 is cylindrical The axis of the central anchor body 201 coincides; there is a gap between the lower end surface of the circular drive mass 202 and the upper surface of the glass substrate 1; the tail end faces of the four straight elastic support ...

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Abstract

The invention relates to a three-axis gyroscope, in particular to a singlechip three-axis MEMS gyroscope based on a wheel-ring mode. The problem that an existing three-axis gyroscope is low in measurement precision and high in production cost is solved. The singlechip three-axis MEMS gyroscope based on the wheel-ring mode comprises a glass substrate, a driving structure, an x-axis sensitive structure, a y-axis sensitive structure and a z-axis sensitive structure; the driving structure comprises a cylindrical central anchor body, a ring-shaped driving mass block, four straight elastic supporting cantilevers, eight movable driving comb teeth and eight pairs of fixed driving comb teeth; the x-axis sensitive structure comprises a first ring-shaped sensitive mass block, two first triangular elastic supporting cantilevers and two first arc-shaped electrodes; and the y-axis sensitive structure comprises a second ring-shaped sensitive mass block, two second triangular elastic supporting cantilevers and two second arc-shaped electrodes. The singlechip three-axis MEMS gyroscope based on the wheel-ring mode is suitable for the high-grade fields of military navigation and deep space exploration.

Description

Technical field [0001] The invention relates to a three-axis gyroscope, in particular to a monolithic three-axis MEMS gyroscope based on a wheel-ring form. Background technique [0002] The three-axis gyroscope is the core sensitive device of the inertial navigation system. It can simultaneously measure the angular velocity input in the x-axis, y-axis and z-axis directions. It is widely used in high-precision fields such as military navigation and deep space exploration. Application prospects. The existing three-axis gyroscopes are mainly divided into two categories: one is an assembled three-axis gyroscope (assembled by three single-axis gyroscopes). This type of three-axis gyroscope is limited by the assembly process and has low measurement accuracy. problem. The other type is a monolithic integrated three-axis gyroscope. The problems with this type of three-axis gyroscope are: First, it cannot achieve complete decoupling of each drive and detection direction, resulting in la...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/02
CPCG01C19/02
Inventor 曹慧亮王亚中刘俊石云波申冲唐军黄堃高晋阳邵星灵曹思宇
Owner ZHONGBEI UNIV
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