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Monolithic integrated z-axis redundant three-axis gyroscope structure array

A monolithic integration and array technology, which is applied in the direction of gyroscopic effect for speed measurement, gyroscope/steering sensing equipment, measurement device, etc., which can solve the problems of low measurement accuracy and high production cost

Active Publication Date: 2019-03-01
ZHONGBEI UNIV
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Problems solved by technology

[0003] In order to solve the problems of low measurement accuracy and high production cost of the existing three-axis gyroscope, the present invention provides a three-axis gyroscope structure array with monolithic integrated z-axis redundancy

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  • Monolithic integrated z-axis redundant three-axis gyroscope structure array

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Embodiment Construction

[0029] A three-axis gyro structure array with monolithic integrated z-axis redundancy, including a glass substrate 1, a first square frame 2, a first drive module, an x-axis detection module, a first z-axis detection module, a first drive detection module, The second square frame 7, the second drive module, the y-axis detection module, the second z-axis detection module, and the second drive detection module;

[0030] The first square frame 2 is located above the glass substrate 1, and the four sides of the first square frame 2 are all parallel to the glass substrate 1; there is a gap between the lower surface of the first square frame 2 and the upper surface of the glass substrate 1;

[0031] The first drive module includes a left vertical strip-shaped movable driving plate 301a, a right longitudinal strip-shaped movable driving plate 301b, two left anchor blocks 302a, two right anchor blocks 302b, two left square wave elastic supports Suspension beam 303a, two right wave-sha...

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Abstract

The invention relates to a three-axis gyroscope, in particular to a monolithic integrated z-axis redundant three-axis gyroscope structure array, and aims to solve the problems of low measuring accuracy and high production cost of the existing three-axis gyroscope. The monolithic integrated z-axis redundant three-axis gyroscope structure array comprises a glass substrate, a first square framework,a first driving module, an x-axis detection module, a first z-axis detection module, a first driving detection module, a second square framework, a second driving module, a y-axis detection module, asecond z-axis detection module and a second driving detection module, wherein the first driving module comprises a left longitudinal stripped movable driving polar plate, a right longitudinal strippedmovable driving polar plate, two left anchor blocks, two right anchor blocks, two left square wave elastic support suspension beams, two right square wave elastic support suspension beams, eight pairs of left fixed driving polar plates, eight pairs of right fixed driving polar plate, a left elastic decoupling suspension beam and a right elastic decoupling suspension beam. The monolithic integrated z-axis redundant three-axis gyroscope structure array is suitable for the high-grade, high-precision, advanced fields of military navigation, deep space exploration and the like.

Description

technical field [0001] The invention relates to a three-axis gyroscope, in particular to a three-axis gyroscope structure array with monolithic integrated z-axis redundancy. Background technique [0002] The three-axis gyroscope is the core sensitive device of the inertial navigation system, which can simultaneously measure the angular velocity input in the directions of x-axis, y-axis and z-axis. It is widely used in high-tech fields such as military navigation and deep space exploration, and has extremely wide application Application prospect. The existing three-axis gyroscopes are mainly divided into two categories: one is the assembled three-axis gyroscope (assembled by three single-axis gyroscopes), this kind of three-axis gyroscope is limited by the assembly process, and has low measurement accuracy. question. The other type is a single-chip integrated three-axis gyroscope. The problems of this kind of three-axis gyroscope are: first, it is impossible to achieve comp...

Claims

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Application Information

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IPC IPC(8): G01C19/5733
CPCG01C19/5733
Inventor 曹慧亮马翊翔刘俊石云波唐军申冲黄堃高晋阳邵星灵苏磬
Owner ZHONGBEI UNIV
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