Two-dimensional ultrasonic vibration platform for micro-nano machining

Abstract

A two-dimensional ultrasonic vibration platform for micro-nano machining comprises a rectangular annular base body. A motion platform is arranged at the center position of a hollow part of the rectangular frame base body. Each of the inner side edges, corresponding to the motion platform, of four frames of the rectangular frame base body is provided with a piezoelectric ceramic driver. A decoupling gasket composed of transverse isotropy materials is arranged between each piezoelectric ceramic driver and the motion platform. The four frames, corresponding to the piezoelectric ceramic drivers, of the rectangular frame base body are provided with threaded-connection pre-tightening bolts penetrating through the frames. The pre-tightening bolts are used for conducting adjustable pre-tighteningon contact connection among the motion platform, the decoupling gaskets and the piezoelectric ceramic drivers. The whole system has enough rigidity and stability. Ultrasonic vibration in the X / Y direction is jointly controlled by two piezoelectric ceramics in the respective direction, and vibration precision and repeatability are guaranteed. Special materials are used for decoupling vibration in the X / Y direction, and the coupling error of ultrasonic vibration in the non-work direction is reduced.

Description

technical field [0001] The invention relates to an acoustic vibration platform. In particular, it relates to a two-dimensional ultrasonic vibration platform for micro-nano processing. Background technique [0002] With the miniaturization of instruments and equipment, various processing methods for micro-nano dimensions have been researched one after another. Among them, the direct scribing method based on AFM probe has the characteristics of low cost, simple control and the ability to process patterns of arbitrary shapes. A micro-nano-fabrication technology with broad application prospects. However, factors such as limited processing speed, unstable processing quality, and limited machinable materials limit the promotion and application of this technology. In order to solve the above problems and aim at various working conditions, a variety of multi-energy source assisted processing methods have been researched, including vibration assisted micro-nano processing. Vibratio...

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Problems solved by technology

However, the existing vibration auxiliary platform is limited by factors such as the stiffness of the vibrating body and the form of excitation, resulting in a limited vibration frequency of the vibration platform, inaccurate control of the amplitude, and the problem of non-decoupling of auxiliary vibration, resulting in a limited effect of vibration assistance. And it is difficult to accurately study the impact of different forms and parameters of vibration on the processing performance of the micro-nano scribing system

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