Self-decoupling micro-gyroscope device for nano-optical grating

A nano-grating and micro-gyroscope technology, which is applied to steering sensing equipment and other directions, can solve the problems of displacement, processing error, coupling error in the detection direction, and achieve the effect of small coupling error, small influence and simple structure.

Pending Publication Date: 2017-12-08
ZHONGBEI UNIV
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Problems solved by technology

However, due to the inevitable existence of machining errors, without considering the decoupling design, the driving motion and the detection motion will affect each other. Even in the absence of angular velocity input, the detection direction will also be displaced, which is the coupling error. The main reason

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Embodiment Construction

[0034] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.

[0035] In the description of the present invention, it should be noted that unless otherwise specified and limited, the terms "connected" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral Ground connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediary, and it can be the internal communication of two components. Those of ordinary skill in the art can under...

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Abstract

The invention relates to a self-decoupling micro-gyroscope device for a nano-optical grating. The self-decoupling micro-gyroscope device mainly structurally comprises a lower base plate, a bonding frame body, an upper base plate, a driving magnet body, a detection magnet body, fixed optical gratings, a driving mass block, detection mass blocks, elastic beams and movable optical gratings, wherein the rectangular driving magnet body, the detection magnet body and the two fixed optical gratings are symmetrically arranged on the lower base plate, the bonding frame body is fixedly connected with the lower base plate and the upper base plate, driving mechanisms, detection mechanisms, a driving mass block and the detection mass block are arranged on the upper base plate, and the movable optical gratings are arranged in the center of the detection mass block. The device is novel in structure, has a self-decoupling effect, is used for detecting a weak Coriolis force by virtue of a nano-optical grating vector optical effect and has the advantages that the sensitivity is high, the precision is high, the noise is low, the temperature influence is avoided, the detection data are accurate and the reliability is good.

Description

technical field [0001] The invention relates to a nano-grating self-decoupling micro-gyroscope device, which belongs to the related field of measuring instrument components of aviation aircraft. Background technique [0002] Gyroscope is an inertial device that can be sensitive to the angle or angular velocity of the carrier, and it plays a very important role in the fields of attitude control, navigation and positioning. [0003] At present, for silicon micro-gyroscopes, the coupling error is an important factor affecting its performance. In an ideal situation, when there is no angular velocity input, the purely driving motion will not be coupled to the detection direction, and similarly, the pure detection motion will not be coupled to the driving direction. However, due to the inevitable existence of machining errors, without considering the decoupling design, the driving motion and the detection motion will affect each other. Even in the absence of angular velocity inpu...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/56
CPCG01C19/56
Inventor 李孟委耿浩梁洲鑫吴倩楠李秀源
Owner ZHONGBEI UNIV
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