A monolithic integrated optical accelerometer
An accelerometer, monolithic integration technology, applied in the field of integrated optics and inertial sensing, can solve the problems of unsuitability for commercial use, low integration, large size, etc., and achieve the effects of low production cost, improved integration, and small size
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[0030] The present invention will be further described below in conjunction with drawings and embodiments.
[0031] like figure 1 As shown, the present invention includes a wide-spectrum light source, an acceleration sensitive unit, a photodetector, a substrate, a cooling sheet, and a packaging shell; The upper surface of the cooling plate and the upper surface of the substrate are arranged in sequence along the optical path direction with a broadband light source, an acceleration sensitive unit, and a photodetector; the bottom of the fixed block is connected to the substrate, and the first microbeam, the second microbeam, the main beam, the first mass leg, Both the second mass leg and the mass block are not connected to the base, and are in a suspended state.
[0032] like figure 2 As shown, the acceleration sensitive unit includes a fixed block, a first microbeam, a second microbeam, a main beam, a first mass leg, a second mass leg, and a mass block; the fixed block and t...
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