High-bandwidth two-freedom-degree parallel flexible precision positioning platform

Abstract

The invention discloses a high-bandwidth two-freedom-degree parallel flexible precision positioning platform. The high-bandwidth two-freedom-degree parallel flexible precision positioning platform comprises a fixed machine frame, four sets of flexible units, a terminal end moving platform, two piezoelectric stacking driving devices, two high-bandwidth capacitance sensors, and two sets of improvedwedge-type pre-tightening devices, wherein a central hollow part and two offset hollow parts are arranged on the fixed machine frame; the four sets of flexible units are connected to and arranged on the inner wall of the central hollow part in a pair opposite manner and in a crossed symmetrical mode; the terminal end moving platform is located at the center of the central hollow part and connectedwith the flexible hinge end of each flexible unit to provide the loading condition for the platform; the two piezoelectric stacking driving devices are respectively arranged in the two offset hollowparts, and the front ends of the two piezoelectric stacking driving devices act on the back end of the corresponding flexible units to provide the high-frequency driving force for the terminal end moving platform; the high-bandwidth capacitance sensors are used for obtaining the displacement information of the terminal end moving platform in the X and Y directions; and the two sets of improved wedge-type pre-tightening devices are fixed on the fixed machine frame and used for pre-tightening the two piezoelectric stacking driving devices. The high-bandwidth two-freedom-degree parallel flexibleprecision positioning platform has the characteristics of being high in bandwidth, high in precision and low in coupling, and the problem of the slow response and the poor coupling performance of thepositioning platform at the present can be solved.

Description

technical field [0001] The invention relates to a positioning device in the field of micro-nano technology, in particular to a high-bandwidth two-degree-of-freedom parallel flexible precision positioning platform. Background technique [0002] At present, the flexible and precise positioning platform has penetrated into various fields, including scanning probe microscopy, micro-nano processing, nano-measurement, biomolecular science, and micro-nano manipulation. The compliant precision positioning platform has the characteristics of no friction, no gap, and compact structure. It relies on the drive of the piezoelectric ceramic driver and the elastic deformation of the compliant unit to transmit motion, and can achieve nanometer-level displacement. However, with the continuous deepening of research in various fields, researchers have put forward requirements for the response speed of the compliant and compact positioning platform, and a compliant and precise positioning platf...

AI Technical Summary

Problems solved by technology

Aiming at the problems of low bandwidth, high coupling, and difficulty in preloading in the current research on compliant precision positioning platforms at home and abroad, this invention designs a high-bandwidth two-degree-of-freedom system based on the improved flexible beam combination and the improved wedge preloading device. Parallel flexible precision positioning platform, this type of platform is compact in structure, easy to install, has the characteristics of high precision, high bandwidth, low coupling, and relatively large stroke, and is suitable for high-speed precision positioning occasions

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