Lever-amplification-principle-based dual-shaft full-decoupling silicone micro-resonator type accelerometer

Abstract

The invention discloses a lever-amplification-principle-based dual-shaft full-decoupling silicone micro-resonator type accelerometer comprising an upper layer and a lower layer. A mechanical structure of a silicone micro accelerometer is arranged at the upper layer and a glass substrate laid with a signal lead is arranged at the lower layer. The mechanical structure is formed by a sensing mass, a common anchor point, lever amplifier mechanisms, decoupling beams, and resonators; one end of one decoupling beam is connected with the sensing mass and the other end is connected with the common anchor point by the lever amplifier mechanisms; and the inertia force applied to the sensing mass is magnified by the lever amplifier mechanisms and then is transmitted to the resonators. The resonators consist of resonance beams, comb racks, movable combs, fixed drive combs, fixed drive feedback combs, and fixed anchor points. According to the silicone micro-resonator type accelerometer, accelerated speed detection at two directions in a plane can be realized; and the frequency is used as an output. The accelerometer has advantages of small size, high integration degree, small coupling error, high sensitivity, and excellent anti-interference capability and the like.

Description

Technical field [0001] The invention belongs to a micro-electronic mechanical system and a micro-inertial measurement technology, in particular to a dual-axis fully decoupled silicon micro-resonance accelerometer based on the principle of lever amplification. Background technique [0002] Thanks to the rapid development of integrated circuit technology, microelectronics technology, and micromechanical processing technology, micro-electro-mechanical systems have emerged. The combination of micro-electro-mechanical systems (MEMS) and inertial technology makes micro-inertial instruments and Research on related technologies becomes possible. Silicon micro-accelerometers have excellent performances such as miniaturization and integration, high reliability, low power consumption, easy digitization and intelligence, and good dynamic performance, which determine that it has broad application prospects and military value, which has caused high levels of various countries. Pay attention t...

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Problems solved by technology

[0003] Domestic research on silicon micro-accelerometers originated in the 1990s. Compared with foreign research levels, silicon micro-accelerometers reported by most institutions can only measure acceleration in a single direction. For inertial navigation, it is necessary to measure three-dimensional directions at the same time. For application fields such as acceleration, three uniaxial accelerometers are required, which increases the occupied space, calibration error and engineering cost; at the same time, some reported silicon micro-accelerometers adopt a non-decoupling structure and no lever amplification mechanism. The coupling error is large and the sensitivity is low; in addition, most silicon micro-accelerometers use flat-plate capacitance drive and detection methods, and the absorption effect and nonlinearity limit the performance of such silicon micro-accelerometers

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