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Dressing member

A technology of components and mounting parts, which is applied in the direction of grinding machine components, electrical components, semiconductor/solid-state device manufacturing, etc., can solve the problems of cost increase and consumption, and achieve the effect of realizing cost

Pending Publication Date: 2021-11-26
DISCO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, the tape is consumed every time the trim plate is replaced, and the cost increases

Method used

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Examples

Experimental program
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Embodiment Construction

[0026] Hereinafter, an embodiment of one aspect of the present invention will be described with reference to the drawings. First, a configuration example of a cutting device capable of dressing a cutting tool using the dressing member of the present embodiment will be described. figure 1 It is a perspective view showing the cutting device 2 . In addition, in figure 1 Here, the X-axis direction (machining feed direction, first horizontal direction, front-rear direction) and the Y-axis direction (index feed direction, second horizontal direction, left-right direction) are mutually perpendicular directions. In addition, the Z-axis direction (vertical direction, vertical direction, and height direction) is a direction perpendicular to the X-axis direction and the Y-axis direction.

[0027] The cutting device 2 has a base 4 that supports or accommodates each component constituting the cutting device 2 . A rectangular opening 4 a opening on the upper surface side of the base 4 is...

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Abstract

The invention provides a dressing member capable of reducing cost. The dressing member to be used for dressing of a cutting blade carried out by a cutting apparatus including a chuck table that holds a workpiece, a cutting unit that cuts the workpiece held by the chuck table by a cutting blade, a cassette mounting section on which a cassette accommodating the workpieces is mounted, and a conveying unit that conveys the workpiece between the cassette mounted on the cassette mounting section and the chuck table, includes a dressing board to be cut by the cutting blade and a rigid plate fixed to the dressing board.

Description

technical field [0001] The present invention relates to a dressing member for dressing a cutting tool for cutting a workpiece. Background technique [0002] A plurality of device chips each having a device is manufactured by dividing a wafer formed with a plurality of devices such as IC (Integrated Circuit: device chip) and LSI (Large Scale Integration: large-scale device chip). In addition, after mounting a plurality of device chips on a predetermined substrate, the mounted device chips can be covered with a sealing material (molding resin) made of resin, whereby a package substrate can be obtained. By dividing the package substrate, a packaged device including a plurality of packaged device chips is manufactured. Device chips and packaged devices are installed in various electronic devices such as mobile phones and personal computers. [0003] A cutting device is used when dividing a workpiece such as the above-mentioned wafer or package substrate. The cutting device in...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B28D5/00B28D5/02B24B3/46
CPCB28D5/022B28D5/0058B28D5/0076B24B3/46B24B53/12B24B37/345B24B37/30H01L21/67092
Inventor 关家一马
Owner DISCO CORP