Method for adjusting meniscus-shaped lens interference inspection light path

Abstract

The invention provides a method for adjusting a meniscus-shaped lens interference inspection light path, which comprises the following steps of adjusting a CGH to align a laser interferometer with the CGH, keeping the alignment state of the laser interferometer and the CGH unchanged, and according to the position of an auxiliary spherical surface cross curve projected on an auxiliary spherical surface by the CGH, adjusting the auxiliary spherical surface, so that stripes of an alignment area for detecting the auxiliary spherical surface on the CGH are adjusted to zero stripes, and no obvious defocus exists; and adjusting the meniscus lens according to the cross curve of the meniscus lens projected by the CGH, so that stripes of an alignment area near the center of the concave surface of the meniscus lens detected on the CGH are adjusted to zero stripes and no obvious defocus exists. According to the method, the same CGH is adopted to realize standard unification of all elements in an interference inspection light path, errors caused in the standard transmission process are avoided, the adjustment and alignment process of each element is divided into coarse alignment and fine alignment, the adjustment process is convenient and rapid, and the whole adjustment process is low in cost, high in precision and good in universality.

Description

technical field [0001] The invention belongs to the technical field of meniscus lens interference inspection, and in particular relates to a method for adjusting the optical path of meniscus lens interference inspection. Background technique [0002] The meniscus lens is often used in telescopes to shorten the length of the lens barrel and increase the field of view. It is an important optical component of modern large-aperture telescopes, and its manufacturing accuracy will directly determine the comprehensive imaging performance of the telescope. [0003] The detection accuracy will directly determine the manufacturing accuracy of optical components. During the development of meniscus lenses, interference testing, as a high-precision detection method, is often used in the high-precision manufacture of meniscus lenses. However, due to the steepness of the meniscus lens and the high sensitivity in the optical path, it is difficult to adjust the optical path for interference ...

AI Technical Summary

Problems solved by technology

[0005] In order to solve the defects of low efficiency and low precision of meniscus lens interference test optical path adjustment, the present invention proposes a meniscus lens interference test optical path adjustment method, which is based on computer generated hologram (Computer Generated Hologram, CGH), Three high-precision alignment areas are designed to align the CGH with the interferometer, align with the auxiliary spherical surface, and align with the concave spherical surface of the meniscus mirror, which can realize the fast and high-precision adjustment of the meniscus lens interference inspection optical path to meet The demand for high-precision optical manufacturing, the operation process is relatively simple, the test cost is low, and the versatility is good

Images