Precision compressor for purification production and processing of ultra-pure element via adsorption method

Abstract

The invention provides a precision compressor for purification production and processing of an ultra-pure element via an adsorption method. The precision compressor comprises a box body, wherein a purification mechanism and a backflow mechanism are arranged in the box body, a purification cylinder of the purification mechanism is arranged in the box body, a purity monitoring instrument of the backflow mechanism is arranged in the purification cylinder, the number of backflow pipes is two, each backflow pipe is provided with a one-way valve, and the other ends of the two backflow pipes separately communicate with a control box. According to the invention, the backflow mechanism is arranged in the box body, and the purity monitoring instrument is arranged in the backflow mechanism; when a small amount of gas which is not completely purified flows out of an adsorption box, the purity monitoring instrument controls an electromagnetic valve to be closed, the one-way valves on the backflow pipes are opened at the same time, and gas which does not reach the standard enters the control box from the backflow pipes and is subjected to adsorption and impurity removal again until the gas completely reaches the standard; and thus, the situation that a small amount of gas is blended into a collecting device is avoided, so purification accuracy is ensured, and experiment effect is ensured.

Description

technical field [0001] The invention belongs to the technical field of gas compression equipment, and in particular relates to a precision compressor for ultra-pure element purification production and processing by an adsorption method. Background technique [0002] In the process of scientific research work, in order to obtain higher purity gas for experiments, it is usually necessary to purify the gas and then go through precise compression. Among them, the method of gas purification can be selected according to the type of gas to be processed. , the commonly used methods are adsorption and so on. [0003] However, when the existing precision compressors for adsorbing and purifying gases are in use, the medium for adsorbing gases will gradually become more and more saturated as the adsorption work progresses, and the ability to adsorb impurity gases will gradually weaken, so it is easy to Part of the gas is mixed with the purified gas and enters the collection device with...

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Problems solved by technology

[0003] However, when the existing precision compressors for adsorbing and purifying gases are in use, the medium for adsorbing gases will gradually become more and more saturated as the adsorption work progresses, and the ability to adsorb impurity gases will gradually weaken, so it is easy to Some gases may be mixed with the purified gas into the collection device without complete purification, which will cause errors in the purity of the processed gas, which cannot achieve the ideal purity and affect the experimental results.

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