Device and method for generating turbulent flow by fluids in plastic pipe and adjusting pipe outside flow

Abstract

The invention relates to a device and a method for generating turbulent flow by fluids in a plastic pipe and adjusting pipe outside flow. When the fluids flow in a pipeline and a cross-sectional shapeand / or an area is changed, the fluids can generate the turbulent flow. By the aid of the phenomenon, a cross-sectional shape and / or area adjusting device is arranged outside the pipeline, so that theturbulent flow is generated, fluid particles are mutually and uniformly blended, a fluid pipeline often needs to turn flow down, a flow adjusting valve is serially connected into the pipeline in prior art, a lot of fine particulate matters can be generated by friction and are mixed into the fluid when the valve acts to adjust the flow in a fluid pipeline of a semiconductor machining device, so that machining quality is affected, the valve is made of good and expensive materials to decrease generation of the particulate matters, and cost is increased. According to the device, an extrusion device sleeves a plastic pipeline, the plastic pipeline is deformed in an extruding manner, the cross-sectional area is decreased, the turbulent flow can be homogenized, the flow can be adjusted, the particulate matters cannot be generated and mixed into the fluids outside the pipeline, the device is simple and reliable, cost is reduced, and device machining quality is improved.

Description

technical field [0001] The invention relates to a fluid pipeline, especially a pipeline using a plastic pipe as a fluid pipeline, which is used in many industrial processing equipment, such as semiconductor wet process equipment. Background technique [0002] Many fluid equipment, such as semiconductor wet process equipment, wafer coating, cleaning, etching, deglue and other equipment, need to use gas or liquid as the working substance. There are many plastic pipes of different thicknesses in the equipment, and the fluid passes through the equipment. Plastic pipes for circulation. [0003] At present, many devices that use fluid as the working substance need to mix the fluid evenly, such as mixing the chemical liquid evenly to make the concentration of the fluid consistent everywhere, which requires a pump to drive the rapid circulation in the pipeline, and the power of the pump is large. The fluid circulation speed can be fast, the circulation speed is slow, the fluid unif...

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Problems solved by technology

[0003] At present, many devices that use fluid as the working substance need to mix the fluid evenly, such as mixing the chemical liquid evenly to make the concentration of the fluid consistent everywhere, which requires a pump to drive the rapid circulation in the pipeline, and the power of the pump is large. The fluid circulation speed can be fast, the circulation speed is slow, the fluid uniformity can not meet the requirements, the circulation speed is fast, the pump speed is fast, the energy consumption is high, the wear and aging of the pump is accelerated, the service life is shortened, and the pump needs to be replaced after several years; many fluids The circulation pipeline needs to adjust the flow rate, and the flow rate has a design margin. Starting from the maximum flow rate, reduce the flow rate to just meet the use requirements, save fluid, and reduce the power consumption of the fluid cycle. The existing technology is to connect the flow in series in the fluid pipeline Flow regulating valve, in the fluid pipeline of semiconductor processing equipment, when the flow regulating valve is turned to adjust the flow, friction between the parts will produce a lot of tiny particles mixed into the fluid, which will affect the purity of the fluid and the processing quality of the equipment, so use particularly good and very expensive materials As a valve, to reduce the generation of particulate matter, such a flow regulating valve is very expensive, mainly relying on imported foreign goods, each several thousand yuan, which increases the cost, and the series flow regulating valve in the pipeline also increases the number of pipe joints, occupying space in the equipment increase, which is not conducive to the compact structure of the equipment

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