Calibration device and calibration method for MEMS Fabry-Perot cavity chip
The technology of a calibration device and calibration method, which is applied in the field of MEMS hyperspectral, can solve the problems of low wavelength calibration efficiency of MEMS method Per cavity chip, and achieve the effect of improving wavelength calibration efficiency and realizing wavelength calibration
Pending Publication Date: 2022-01-04
SHEN ZHEN HYPERNANO OPTICS TECH CO LTD
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Problems solved by technology
[0004] In order to solve the problem that the wavelength calibration efficiency of the existing MEMS method per cavity chip is low, the application provides a calibration device and calibration method for the MEMS method per cavity chip, so as to improve the wavelength calibration efficiency of the MEMS method per cavity chip
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[0038] In the following detailed description, reference is made to the accompanying drawings, which form a part hereof, and which show by way of illustration specific embodiments in which the invention may be practiced. In this regard, directional terms such as "top", "bottom", "left", "right", "upper", "lower", etc. are used with reference to the orientation of the figures being described. Because components of an embodiment may be positioned in several different orientations, directional terminology is used for purposes of illustration and is by no means limiting. It is to be understood that other embodiments may be utilized or logic changes may be made without departing from the scope of the present invention. The following detailed description should therefore not be taken in a limiting sense, and the scope of the invention is defined by the appended claims.
[0039] figure 1 A schematic structural view of a calibration device for a MEMS Fap cavity chip of the present in...
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The invention provides a calibration device for an MEMS Fabry-Perot cavity chip, and the device comprises a narrow-band light emission module, the control end of the narrow-band light emission module is electrically connected to a processing terminal, the emergent end of the narrow-band light emission module is connected with a focusing module, the emergent end of the focusing module is provided with a collimator, an emitting end of the collimator is provided with an imaging sensor, the imaging sensor is electrically connected to the processing terminal, and a space for placing the MEMS Fabry-Perot cavity chip is arranged between the collimator and the imaging sensor. According to the invention, the narrow-band light emitting module provides narrow-band light with different central wavelengths, the focusing module focuses the narrow-band light, the collimator collimates the narrow-band light and emits the narrow-band light to the MEMS Fabry-Perot cavity chip to generate interference, the imaging sensor collects an interference image, the processing terminal reads and analyzes the interference image, therefore, the wavelength of the MEMS Fabry-Perot cavity chip is automatically calibrated, and the wavelength calibration efficiency is greatly improved.
Description
technical field [0001] The invention belongs to the technical field of MEMS hyperspectrum, and in particular relates to a calibration device and a calibration method for a MEMS peroxide cavity chip. Background technique [0002] The optical principle of the MENS Fabry-Perot cavity chip is based on the principle of Fabry-Perot interference. It is a spectroscopic chip made by semiconductor integrated circuit technology. The chip is driven with different voltages to obtain different narrow-wave spectra. Before the MENS chip is integrated into the hyperspectral system, the wavelength of the MENS chip needs to be calibrated, so as to make basic calibration preparations for the implementation of imaging and hyperspectral detection algorithms in the hyperspectral system. At present, the wavelength calibration of the MEMS Pap cavity chip is mainly manual. In addition to the data processing time, the single calibration test of a single MEMS Pap cavity chip takes a long time, and it n...
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IPC IPC(8): G01J9/02
CPCG01J9/0246
Inventor 黄锦标郭斌
Owner SHEN ZHEN HYPERNANO OPTICS TECH CO LTD