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Surface modification method of quartz glass rotary workpiece processed by droplet adhesion chemical processing

A quartz glass and chemical processing technology, applied in the field of surface modification of quartz glass revolving workpieces, can solve the problems of complex operation, stress concentration and high cost

Active Publication Date: 2022-06-28
TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Currently, prior art 3 (Hu Xiaodong, Luo Kangjun, Yu Bo, et al. Using ion beam technology to balance the mass of the hemispherical vibrator [C] / / Proceedings of the Fifth Academic Annual Conference of the Chinese Society of Inertial Technology. 2003.) is publicly available The ion beam trimming technology is a commonly used method, but the equipment used is very expensive and the operation is complicated; in addition, prior art 4 (Hamelin B, Tavassoli V, Ayazi F. Localized Eutectic Trimming of Polysilicon Microhemispherical Resonating Gyroscopes[J] .IEEE Sensors Journal, 2014,14(10):3498-3505.) disclosed that laser can also be used for surface modification, but there is a problem of local stress concentration, and the cost of laser treatment is also high, and the operation is relatively complicated
[0004] Therefore, the existing surface modification method for quartz glass after grinding needs to be improved

Method used

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  • Surface modification method of quartz glass rotary workpiece processed by droplet adhesion chemical processing
  • Surface modification method of quartz glass rotary workpiece processed by droplet adhesion chemical processing
  • Surface modification method of quartz glass rotary workpiece processed by droplet adhesion chemical processing

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0056] The purpose of this example is to carry out chemical processing of droplets on the quartz glass rotary body to obtain a quartz glass rotary body without microcracks, no metamorphic layer, and a smooth surface. The final surface roughness Ra value of the quartz glass rotary body workpiece not more than 50nm. refer to Figure 7 , The selected feature of the quartz glass rotary workpiece to be processed is the end face part, the radius of gyration is 7.5-10mm, and the specific material model is Corning7980. The selected quartz glass revolving workpiece has a surface roughness Ra value of 0.5 μm. The selected etching solution is buffer oxide etching solution (the composition after configuration is 3wt% HF, 30wt% NH 4 F). The main steps are as follows:

[0057] 1) The quartz glass workpiece is clamped on the precision rotating spindle (radial runout ≤ 0.005mm), so that it can rotate around the center line;

[0058] 2) Using the liquid supply system, a droplet with a rad...

Embodiment 2

[0064] The purpose of this example is to carry out chemical processing of droplets on the quartz glass rotary body to obtain a quartz glass rotary body without microcracks, no metamorphic layer, and a smooth surface. The final surface roughness Ra value of the quartz glass rotary body workpiece not more than 50nm. refer to Figure 8 , The selected feature of the quartz glass revolving workpiece to be processed is an outer spherical surface with a radius of 10mm, and the radius of gyration is in the range of 2-10mm. The specific material model is Corning7980. The selected quartz glass revolving workpiece has a surface roughness Ra value of 0.5 μm. The selected etching solution is buffer oxide etching solution (the composition after configuration is 3wt% HF, 30wt% NH 4 F). The main steps are basically the same as in Example 1, and the difference between the two is only in step 4) and step 5), and step 4) and step 5) in this embodiment are expressed as follows:

[0065] 4) Co...

Embodiment 3

[0068] The purpose of this example is to carry out chemical processing of droplets on the quartz glass rotary workpiece to obtain a quartz glass rotary workpiece without microcracks, no metamorphic layer, and a smooth surface. The final surface roughness Ra value of the quartz glass rotary workpiece not more than 50nm. refer to Figure 9 , The selected feature of the quartz glass revolving workpiece to be processed is an inner spherical surface with a radius of 9mm, and the radius of gyration is in the range of 2-9mm. The specific material model is Corning7980. The selected quartz glass revolving workpiece has a surface roughness Ra value of 0.5 μm. The selected etching solution is buffer oxide etching solution (the composition after configuration is 3wt% HF, 30wt% NH 4 F). The main steps are basically the same as in Example 1, and the difference between the two is only in step 4) and step 5), and step 4) and step 5) in this embodiment are expressed as follows:

[0069] 4)...

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Abstract

The invention discloses a surface modification method for quartz glass rotary body workpieces chemically processed by droplet adhesion, which includes: clamping the workpiece on a spindle, and the spindle drives the workpiece to rotate around the center line; and generating protruding corrosion at the nozzle. The droplet is in contact with the surface of the workpiece, and the radius of the droplet is controlled to remain stable; according to the contact area between the droplet and the surface of the workpiece and the target surface roughness requirements of the workpiece, the lower limit v of the relative linear velocity of the workpiece is determined; according to the relative linear velocity The lower limit v and the radius of rotation of the workpiece determine the lower limit of the spindle speed N; control the spindle speed ≥ N, and control the relative movement of the droplet center point to process the workpiece surface, and the distance between the droplet center and the workpiece surface remains unchanged; detect the nozzle If the flow signal change of the droplet exceeds the threshold, the surface modification of the workpiece is deemed to be completed. This method can be used to obtain quartz glass rotary workpieces with no microcracks, no deterioration layer, and smooth surface. The operation is simple and has good controllability.

Description

Technical field [0001] The invention belongs to the field of special processing technology, and specifically relates to a surface modification method of a quartz glass rotary workpiece processed by droplet wall-attaching chemical processing. Background technique [0002] Quartz glass material has good light transmittance, low damping, low thermal expansion coefficient, and excellent electrical insulation properties and chemical stability. Therefore, it is widely used in nuclear fusion, optical instruments, inertial navigation and other fields. However, quartz glass is a hard Brittle materials are difficult to process, and cracks and damage layers are prone to appear on the processed surface, making it difficult for the obtained workpiece surface to meet current usage requirements. [0003] Currently, grinding is the most important method for processing quartz glass. However, existing technology 1 (Suratwala T, SteeleR, M.D. Feit, et al. Effect of rogue particles on the sub-...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C03C15/00
CPCC03C15/00
Inventor 李勇刘语杰刘国栋佟浩谈齐峰
Owner TSINGHUA UNIV