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Laminated piezoelectric element

A piezoelectric element, laminated technology, applied in the direction of electrical components, piezoelectric/electrostrictive/magnetostrictive devices, circuits, etc., can solve the problem of reduced polarization, high resistance value, and resistance value change of the resistance layer And other issues

Pending Publication Date: 2022-02-22
TDK CORPARATION
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This reduced polarization does not recover even if the temperature rises again. Therefore, there is a problem that when the temperature lowering process is repeated, the polarization gradually decreases, the desired displacement cannot be obtained, and the characteristics deteriorate.
However, in the multi-layer piezoelectric element disclosed in Patent Document 2, it has been found that the resistance value of the resistance layer may fluctuate due to exposure of the resistance layer to the outside air without any treatment.
In addition, in the multi-layer piezoelectric element disclosed in Patent Document 2, it has also been found that the resistance layer connecting a pair of external electrodes tends to become thinner at the corner of the element body, and the resistance value tends to increase.
It has the following technical problem: when the resistance of the resistance layer is locally too high, it is easy to be insufficient to suppress the deterioration of the degree of polarization caused by the pyroelectric effect

Method used

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Examples

Experimental program
Comparison scheme
Effect test

no. 1 approach

[0051] Such as figure 1 As shown, the multi-layer piezoelectric element 1 of the present embodiment has an element body 10 in the shape of a quadrangular prism. Inside the element main body 10 , the first internal electrode 3 , the piezoelectric layer 2 , and the second internal electrode 4 having a polarity different from that of the first internal electrode 3 are repeatedly laminated along the Z-axis direction (stacking direction). In addition, in the drawings, the X axis, the Y axis, and the Z axis are perpendicular to each other, and the Z axis coincides with the stacking direction.

[0052] Such as Figure 2A As shown, on the first side surface 10 a of the element main body 10 , the front ends of the first internal electrodes 3 in the X-axis direction are exposed, and the first external electrodes 5 are formed so as to be electrically connected to these first internal electrodes 3 . Further, on the second side surface 10 b of the element body 10 , the tips of the second...

no. 2 approach

[0091] Such as Figure 4 and Figure 5 As shown, the multilayer piezoelectric element 1a of this embodiment is the same as the multilayer piezoelectric element 1 of the above-mentioned first embodiment except for the following, and the common components are given common symbols and the common parts are omitted. illustrate.

[0092] In this embodiment, unlike the first embodiment, the resistive layer is not formed so as to cover the entire surface of the third side surface 10c of the element body 10, but is formed to cover only both sides of the third side surface 10c in the X-axis direction. Resistive layer 20a. In this embodiment, the resistance layer 20a formed on the third side surface 10c has a pair of vertical continuous portions 22a, 22a, and extension portions 24a, 24a are integrally formed in each vertical continuous portion 22a, 22a, respectively.

[0093] A longitudinal continuous portion 22a extends in stripes along the Z axis, so that the front end of the first ...

no. 3 approach

[0100] Such as Figure 6 and Figure 7 As shown, the multi-layer piezoelectric element 1b of this embodiment is the same as the multi-layer piezoelectric element 1a of the above-mentioned second embodiment except for the following, and common components are given common symbols and common parts are omitted. instruction of.

[0101] In this embodiment, the resistive layer 20b is composed of at least one pair of longitudinal continuous portions 22b and at least one transverse continuous portion 26b. It is also possible to form an extension portion 24b in each longitudinal continuous portion 22b.

[0102] In this embodiment, unlike the second embodiment, stripe-shaped longitudinal continuous portions 22b formed on both sides in the X-axis direction of the third side surface 10c of the element body 10 are integrally connected by at least one transverse continuous portion 26b. In the present embodiment, the two ends of the pair of vertical continuous portions 22b in the Z-axis d...

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Abstract

[Problem] To provide a laminated piezoelectric element having an excellent suppression effect on characteristics deterioration caused by a pyroelectric effect. [Solution] Inside an element main body 10 are a first internal electrode 3, a piezoelectric layer 2, and a second internal electrode 4 that has different polarity from the first internal electrode 3, which are repeatedly layered a plurality of times along the lamination direction. A first external electrode 5 is formed on a first side surface 10a of the element main body 10. A second external electrode 6 is formed on a second side surface 10b of the element main body 10. A resistance layer 20 connected to the internal electrodes 3, 4 is formed in at least part of a third side surface 10c of the element main body 10 in which the internal electrodes are exposed 3, 4. An insulating layer 30 is formed on a third side 10c of the element main body 10 so as to cover the resistance layer 20.

Description

technical field [0001] The present invention relates to a laminated piezoelectric element. Background technique [0002] Piezoelectric elements are elements that use the piezoelectric effect and the inverse piezoelectric effect to convert mechanical displacement and electrical displacement to each other. Piezoelectric elements are used in various products, for example, as actuators for applications requiring precise and precise control. Specifically, applications such as lens driving, HDD head driving, inkjet printer head driving, and fuel injection valve driving are exemplified. [0003] In addition, in order to increase the obtained displacement, when the piezoelectric element is stacked to form a multi-layer piezoelectric element, the ends of the internal electrodes sandwiching the piezoelectric layers may be exposed on the surface of the element body. In this case, migration may occur between internal electrodes having different polarities due to moisture in the air or...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L41/297H01L41/187H01L41/083H01L41/293H10N30/50H10N30/80H10N30/063H10N30/067H10N30/853H10N30/87
CPCH10N30/50H10N30/853H10N30/067H10N30/063H10N30/875H10N30/053H10N30/802H10N30/871H10N30/872
Inventor 宫崎智史佐藤靖行小口惠治
Owner TDK CORPARATION
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