Unlock instant, AI-driven research and patent intelligence for your innovation.

Micro LED depth measurement device based on single camera

A depth measurement, single-camera technology, applied in measurement devices, optical devices, instruments, etc., can solve problems such as few small flat objects

Pending Publication Date: 2022-03-01
TIANJIN POLYTECHNIC UNIV
View PDF0 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, existing methods are mostly used for spherical objects and rarely for planar small objects

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Micro LED depth measurement device based on single camera
  • Micro LED depth measurement device based on single camera
  • Micro LED depth measurement device based on single camera

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0038] The specific implementation manner of the content of the invention will be described below in conjunction with the accompanying drawings.

[0039] Step 1: Use a high-precision multi-axis motion stage with a step of 0.1 μm to move the μLED up and down. At the same time, the μLED image is obtained through the camera.

[0040] Step 2: Determine the focal plane using the average gradient method, as shown in equation (14):

[0041]

[0042] where F x (i,j) and F y (i, j) represents the first-order difference of pixel (i, j) in the x and y directions, and M and N represent the dimensions of the image. The position with the largest average gradient is set as the origin.

[0043] Step 3: Calculate the value of C according to equation (12).

[0044] Step 4: Repeat Step 1 to resolve any creep issues with the system.

[0045] Obtaining C(U) with different u, the value of C at the focal plane is 0. As the μLED moves away from the focal plane, the value of C(U) decreases. ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The high-precision micrometer depth measurement is of great significance in many fields. At present, many methods for measuring the depth of a spherical surface have been proposed, but a small part of the methods can measure the depth of a planar object, such as a mu LED which has advantages in the aspects of brightness, energy consumption and corresponding speed. Depth measurement is one of key technologies for muLED transfer printing. The invention provides a method for measuring the depth of a mu LED array by using a single camera. The device comprises a camera module 1, a microconsole module 2 and a mu LED array module 3. According to the method, a high-precision displacement table is adopted for calibration, and uncertain factors, such as camera distortion, camera inclination, curve fitting and surface roughness, of the mu LED are evaluated. The result shows that the relative standard uncertainty of the method is about 3.9%. This indicates that the proposed system is very stable and repeatable.

Description

technical field [0001] The invention relates to a device for measuring the depth of a microLED based on a single camera, in particular to a device for measuring the ambiguity function of the microLED by using a single camera, and then measuring the depth of the microLED, which belongs to the field of semiconductors. Background technique [0002] High-precision micron depth measurement has important application value in the fields of robots, materials, precision instruments and micro-electromechanical systems. Many methods for measuring spherical depth have been proposed. However, they rarely measure the depth of planar objects such as μLEDs. The size of μLEDs is generally less than 100 μm. The main advantage of μLED is that each LED can be controlled and driven independently, so its power consumption, brightness, resolution, contrast, heat dissipation and other characteristics are very good. However, in practical applications, it is necessary to transfer the μLED to the c...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/22
CPCG01B11/22
Inventor 牛萍娟白杰王珊孙浩杨孟宇曹世楠
Owner TIANJIN POLYTECHNIC UNIV