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Conveying device

A technology for conveying devices and storage tanks, which is applied in the direction of conveyor objects, transportation and packaging, furnaces, etc., and can solve problems such as production product efficiency discounts, corporate economic losses, and delays in product delivery schedules

Pending Publication Date: 2022-04-08
NAN YA TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

If the robot arm deviates slightly or does not move smoothly (such as vibration) during the transfer process, it will cause scratches or even fragments on the wafer, which will cause huge economic losses to the enterprise
[0003] In addition, manufacturers also require the transportation efficiency of machines. If the speed of wafer transportation by the robot arm is slow, the efficiency of product production will be greatly reduced, which will delay the delivery time of products, thus affecting customer orders and reducing the competitiveness of enterprises.

Method used

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Embodiment Construction

[0028] A number of implementations of the present invention will be disclosed below with the accompanying drawings. For the sake of clarity, many practical details will be described together in the following description. It should be understood, however, that these practical details should not be used to limit the invention. That is, in some embodiments of the present invention, these practical details are unnecessary. In addition, for the sake of simplifying the drawings, some existing conventional structures and elements will be shown in a simple and schematic way in the drawings.

[0029] Please refer to Figure 1A and Figure 1B . Figure 1A According to some embodiments of the present invention, a schematic side view of the delivery device 100a is shown. Figure 1B draw Figure 1A A schematic diagram of the inclined state of the transport device 100a. In some embodiments of the present invention, the delivery device 100 a includes a base body 110 , a clamping arm 130 a...

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Abstract

The invention discloses a conveying device which comprises a clamping arm and a balance sensor. The balance sensor is arranged on the clamping arm. The balance sensor comprises a body, a conductive circuit and a sliding conductor. The body is provided with an accommodating groove. The conductive circuit is arranged on the side wall of the accommodating groove. The sliding conductor is arranged in the containing groove, and the sliding conductor is arranged to be in contact with or separated from the conductive circuit to enable the conductive circuit to be closed or open. The balance sensor judges whether the clamping arm is in a balance state or an inclined state according to the open circuit or the closed circuit of the conductive circuit so as to achieve the function of sensing whether the clamping arm is inclined or not. Therefore, according to the conveying device, the condition of the clamping arm can be effectively, accurately and instantly reflected.

Description

technical field [0001] The invention relates to a transport device, in particular to a transport device for transporting semiconductor wafers. Background technique [0002] The machines used in the semiconductor process have extremely precise robotic arms and require extremely high stability when transporting wafers. If the robot arm deviates slightly or does not move smoothly (such as vibration) during the transfer process, it will cause scratches or even fragments on the wafer, which will cause huge economic losses to the enterprise. [0003] In addition, manufacturers also require the transportation efficiency of machines. If the speed of wafer transportation by the robot arm is slow, the efficiency of product production will be greatly reduced, which will delay the delivery schedule of products, thus affecting customer orders and reducing the competitiveness of enterprises. [0004] Therefore, how to propose a conveying device that can solve the above-mentioned problems...

Claims

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Application Information

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IPC IPC(8): B65G47/90B65G49/07H01L21/677
Inventor 蔡奉儒董学儒
Owner NAN YA TECH