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Micro-electro-mechanical system structure for minimizing out-of-plane sensing accelerometer offset

A micro-electromechanical system, sensing electrode technology, applied in the direction of measuring acceleration, micro-structure technology, micro-structure devices, etc., can solve the problem of stress test radical and other issues

Pending Publication Date: 2022-04-22
INVENSENSE
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, offset stability of MEMS accelerometers is a key challenge as specification constraints tighten across all market segments (e.g. consumer, automotive, industrial, etc.) and stress testing becomes more aggressive

Method used

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  • Micro-electro-mechanical system structure for minimizing out-of-plane sensing accelerometer offset
  • Micro-electro-mechanical system structure for minimizing out-of-plane sensing accelerometer offset
  • Micro-electro-mechanical system structure for minimizing out-of-plane sensing accelerometer offset

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Embodiment Construction

[0033] While a brief summary is provided, certain aspects of the disclosure are described or depicted herein for purposes of illustration and not limitation. Accordingly, variations of the disclosed embodiments suggested by the disclosed devices, systems and methods are intended to be included within the scope of the herein disclosed subject matter. The following description is presented to enable one of ordinary skill in the art to make and use the various disclosed embodiments, and is provided in the context of a patent application and its claims. Various modifications to the preferred embodiment and the general principles and features described herein will be readily apparent to those skilled in the art. Thus, the disclosed subject matter is not intended to be limited to the embodiments shown, but is to be accorded the widest scope consistent with the principles and features described herein.

[0034]Microelectromechanical systems (MEMS) refer to a class of microscale devi...

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Abstract

Exemplary embodiments of tilted z-axis out-of-plane sensing micro-electro-mechanical system accelerometers and related structures and configurations are described. The disclosed embodiments help to improve offset stability. Non-limiting embodiments provide exemplary micro-electro-mechanical system structures and devices, the sensor is characterized in that one or more sensing micro-electro-mechanical system structures are axisymmetric about a spring or elastic coupling axis orthogonal to the axis of symmetry, the spring or elastic coupling axis is aligned with one of the axes of symmetry of the electrode pattern, different numbers of reference electrodes and sensing electrodes are provided, and at least two axes of symmetry are provided. Wherein one is along the spring or elastic coupling axis) and / or a reference structure below the spring or elastic coupling axis.

Description

[0001] priority claim [0002] This application claims the U.S. patent application titled "MEMS STRUCTURE FOR OFFSET MINIMIZATION OF OUT-OF-PLANESENSING ACCELEROMETERS," filed April 7, 2020. Priority of Nonprovisional Application Serial No. 16 / 842,619, U.S. Patent Application Serial No. 16, filed November 4, 2019, entitled "OFFSET REJECTION ELECTRODES" / 673,602, a continuation-in-part of, and claiming priority from, U.S. Patent Application Serial No. 16 / 673,602, U.S. Patent Application Serial No. 15 / , filed March 8, 2018, entitled "OFFSETREJECTION ELECTRODES" 916,105 (now U.S. Patent No. 10,466,268), a continuation of U.S. Patent Application Serial No. 15 / 916,105, filed May 15, 2015, entitled "OFFSET REJECTION ELECTRODES" Divisional Application No. 14 / 714,149 (now US Patent No. 9,952,252). Additionally, this patent application asserts a patent application entitled "MEMS STRUCTURE FOR OFFSET MINIMIZATION OF OUT-OF-PLANE SENSING ACCELEROMETERS" filed on April 7, 2020 16 / 842,619...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P21/00G01P15/125B81B7/00
CPCG01P21/00G01P15/125B81B7/0016G01P2015/0831G01P2015/0822
Inventor G·拉吉M·J·汤普森L·科罗纳托R·马提尼
Owner INVENSENSE
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