Radio frequency and direct current co-sputtering gray decorative film layer and method and application thereof

A technology of DC sputtering and RF sputtering, which is applied in the field of coated decorative film products, radio frequency and DC co-sputtering gray decorative film, to achieve the effect of simple process control, process safety, and easy color control

Pending Publication Date: 2022-05-10
XIAMEN RUNNER IND CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to provide a low process control requirement, the color fluctuation of the gray decorative film layer is small, and the obtained film layer is not easy to change color when placed in the air naturally, and can pass the AASS48H / CASS8H salt spray test stably, and does not need to be used in production. The coating process of flammable gas, to solve the above background technical problems

Method used

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  • Radio frequency and direct current co-sputtering gray decorative film layer and method and application thereof
  • Radio frequency and direct current co-sputtering gray decorative film layer and method and application thereof
  • Radio frequency and direct current co-sputtering gray decorative film layer and method and application thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0034] 1. Use the ABS base material test plate that has been electroplated with copper, nickel and chromium on the surface and brushed. After the surface is cleaned, it is placed on the turntable in the cavity of the coating machine. The RF sputtering power supply is connected to the graphite target, and the DC sputtering power supply is connected to the zirconium target. ;

[0035] 2. Turn on the vacuum pumping system and pump the vacuum in the cavity to 8.0*10 -3 Pa;

[0036] 3. Introduce argon gas to maintain the vacuum degree in the cavity at 4.6*10 -1 Pa, turn on the DC sputtering power supply, adjust the output power of the zirconium target to 100w, and deposit metal Zr for 5min as the bottom layer;

[0037] 4. Introduce argon gas to maintain the vacuum degree in the cavity at 4.6*10 -1 Pa, turn on the RF sputtering power supply and the DC sputtering power supply at the same time, adjust the output power of the RF sputtering power supply to 100w, adjust the output pow...

Embodiment 2

[0041] 1. Use the ABS base material test plate that has been electroplated with copper, nickel and chromium on the surface and brushed. After the surface is cleaned, it is placed on the turntable in the cavity of the coating machine. The RF sputtering power supply is connected to the graphite target, and the DC sputtering power supply is connected to the zirconium target. ;

[0042] 2. Turn on the vacuum pumping system and pump the vacuum in the cavity to 5.0*10 -3 Pa;

[0043] 3. Introduce argon gas to maintain the vacuum degree in the cavity at 4.0*10 -1 Pa, turn on the DC sputtering power supply, adjust the output power of the zirconium target to 50w, and deposit metal Zr for 5min as a primer;

[0044] 4. Introduce argon gas to maintain the vacuum degree in the cavity at 4.0*10 -1 Pa, turn on the RF sputtering power supply and the DC sputtering power supply at the same time, adjust the output power of the RF sputtering power supply to 100w, adjust the output power of the...

Embodiment 3

[0048] 1. Adopt the ABS base material cylindrical piece that has been electroplated with copper, nickel and chromium on the surface and brushed. After the surface is cleaned, it is placed on the turntable in the cavity of the coating machine. The RF sputtering power supply is connected to the graphite target, and the DC sputtering power supply is connected to the zirconium. target;

[0049] 2. Turn on the vacuum pumping system and pump the vacuum in the cavity to 1.0*10 -2 Pa;

[0050] 3. Introduce argon gas to maintain the vacuum degree in the cavity at 6.0*10 -1 Pa, turn on the DC sputtering power supply, adjust the output power of the zirconium target to 100w, and deposit metal Zr for 10min as a primer;

[0051] 4. Introduce argon gas to maintain the vacuum degree in the cavity at 6.0*10 -1 Pa, turn on the RF sputtering power supply and the DC sputtering power supply at the same time, adjust the output power of the RF sputtering power supply to 150w, adjust the output po...

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Abstract

The invention provides a radio frequency and direct current co-sputtering method for a gray decorative film layer, which comprises the following steps of: placing a base material in a coating machine, connecting a radio frequency sputtering power supply with a graphite target, connecting a direct current sputtering power supply with a zirconium target, starting vacuum pumping, introducing argon to maintain the vacuum degree at 4.0 * 10 <-1 >-6.0 * 10 <-1 > Pa, starting the direct current sputtering power supply, adjusting the output power to 50-100w, and carrying out vacuum pumping, metal zirconium is deposited for 5-10 min for bottoming; the method comprises the following steps: placing a substrate in a vacuum chamber, introducing argon, maintaining the vacuum degree in the chamber at 4.0 * 10 <-1 > to 6.0 * 10 <-1 > Pa, simultaneously starting a radio-frequency sputtering power supply and a direct-current sputtering power supply, adjusting the output power of the radio-frequency sputtering power supply to be 100-150w and the output power of the direct-current sputtering power supply to be 50-100w, depositing for 30-60 minutes, and plating a zirconium carbide gray decorative film layer on the substrate. According to the method for obtaining the gray decorative film layer through radio frequency and direct current co-sputtering, the process is simple, the color is adjustable, the gray decorative film layer can be plated on the surfaces of various metal or non-metal materials, and the obtained gray decorative film layer does not change color after being naturally placed in air, can stably pass a salt spray test and has a wide market prospect in the field of decorative film plating.

Description

technical field [0001] The invention relates to the technical field of decorative coating, and in particular to a method for co-sputtering a gray decorative film layer by radio frequency and direct current, the application of the method, and a decorative film coated product obtained by the method. Background technique [0002] At present, gray decorative coatings are particularly popular in the field of decorative coatings, and there is a huge market for them ranging from kitchen and bathroom furniture to personal consumer goods. Most of the existing PVD (Physical Vapor Deposition, physical vapor deposition) production processes use ionized metal targets (such as zirconium, chromium, etc.) while passing carbon-containing gases (such as methane, acetylene, etc.) to participate in the reaction deposition to form metal carbides Gray decorative film layer, this method has the following disadvantages: [0003] (1) The process control requirements are high, and the color of the c...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/34C23C14/06C23C14/16C23C14/20C23C14/35C23C28/00
CPCC23C14/0015C23C14/3464C23C14/0635C23C14/165C23C14/205C23C14/0036C23C14/352C23C28/32C23C28/341
Inventor 黄先杰潘弦乔永亮陈招豪蒋义锋
Owner XIAMEN RUNNER IND CORP
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