Fluid control device, control method for fluid control device, and program storage medium
A fluid control device and fluid technology, applied in flow control, liquid/fluid solid measurement, controllers with specific characteristics, etc., can solve the problem of reducing flow response speed and achieve the effect of shortening time
Pending Publication Date: 2022-05-27
HORIBA STEC CO LTD
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Problems solved by technology
In order to avoid this kind of problem, we will consider increasing the security rate, but this will reduce the response speed of the increase in traffic, etc.
Method used
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[0045] refer to Figure 1 to Figure 8 The fluid control device 100 in the first embodiment of the present invention will be described.
[0046] The fluid control device 100 is, for example, a flow control device used in order to control the flow rates of various gases supplied into the chamber in a semiconductor manufacturing process. Specifically, the fluid control device 100 is a so-called mass flow controller, and is attached to the piping connected to the chamber.
[0047] The fluid control device 100 is as figure 1 As shown, it includes: a main body B in which a flow channel L through which fluid flows is formed; a thermal flow sensor FS as a fluid sensor provided in the flow channel L; a control valve V provided on the downstream side of the flow sensor FS; The plate CB controls the control valve V so that the measured flow rate, which is the measured amount of the flow sensor FS, matches the set flow rate, which is the set amount set by the user.
[0048] Flow sensor...
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The invention provides a fluid control device, a control method of the fluid control device, and a program storage medium, which can set an initial applied voltage applied when a control valve is controlled from a fully closed state so that a measurement amount becomes a set amount to a value close to an opening initial voltage as much as possible. Therefore, the response speed can be improved, and the generation of large-scale escape and the like can be prevented. A valve controller (2) of the fluid control device is provided with: an initial drive voltage setting unit (22) for inputting, to a voltage generation circuit, a voltage command for setting an initial drive voltage to be applied to a control valve (V) when the control valve (V) is changed from a fully closed state to a predetermined opening degree; and a drive history storage unit (21) for storing drive history information of the control valve, and the initial drive voltage setting unit (22) changes the value of the initial drive voltage in accordance with the drive history information.
Description
technical field [0001] The present invention relates to a fluid control device for controlling, for example, the flow rate, pressure, and the like of various gases used in a semiconductor manufacturing process to a desired set amount. Background technique [0002] This type of fluid control device includes a flow sensor provided in a flow passage through which the fluid flows, a control valve, and a flow controller that feedback-controls the control valve so that the flow rate measured by the flow sensor reaches a set flow rate. [0003] In addition, when the control valve is completely closed, when the control valve is started to be controlled to another opening degree so that the flow rate reaches a set flow rate other than zero from the state of zero flow rate, if the above-mentioned feedback control is performed from the beginning, the measurement is performed. It takes time for the flow to end up to the set flow rate. [0004] This is because, in the case of a normally...
Claims
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IPC IPC(8): F16K31/02F16K37/00
CPCF16K31/02F16K37/0083G05D7/0635F16K37/005F16K31/007G01F1/6847G01F15/005G05B11/36G05D7/0623Y10T137/7761
Inventor 赤土和也
Owner HORIBA STEC CO LTD