Scrubber system equipped with automatic pressure control venturi
A technology of venturi and pressure control, applied in the field of scrubbers, to achieve the effect of eliminating pipeline blockage
Pending Publication Date: 2022-07-29
MAT PLUS
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Problems solved by technology
[0004] The object of the present invention is to provide a scrubber system that solves the problem of powder being piled up on the air inlet guard during long-term use, does not cause backflow to the main tool side even without a blower, and can treat objects Introduced along the processing path of the scrubber
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[0055] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.
[0056] figure 1 The structure which the scrubber of this invention has is shown schematically, and it is a schematic flowchart which shows the process flow. The to-be-processed substances including harmful gases, particles, etc. generated by main tools such as semiconductor manufacturing apparatuses descend into the inlet guard 100 through the introduction port 10 introduced to the scrubber side, and the inlet guard 100 is connected to the inlet guard 100. The first chamber 110 of the lower tube portion at the lower end flows in and rises to the second chamber 120 arranged above the first chamber 110 . The first chamber 110 and the second chamber 120 are adjacent to each other in the up-down direction with a partition having an opening portion interposed therebetween, and the objects to be processed rise through the opening. The air in...
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The invention relates to a scrubber system equipped with a pressure automatically controlled venturi. The present invention provides a scrubber system in which the structure of a conventional scrubber air inlet protector is improved, the diameter of the lower end of a second cleaning liquid buffer (3) constituting the lower end of the air inlet protector is enlarged, and a separate nozzle is provided in a lower pipe portion, so that the generated powder does not clog the lower end of the air inlet protector, and the scrubber system can be used for cleaning the lower end of the air inlet protector. The path of the object to be processed is formed in a way that the object to be processed descends for the first time along the air inlet protection device, then ascends for the first time along the first chamber and the second chamber and descends for the second time to the third chamber, and an automatic pressure control system equipped with a Venturi tube is arranged at the upper end of the third chamber, so that the object to be processed is prevented from flowing back. And the air is guided to a fourth chamber with a polypropylene absorber, ascends for the second time in the fourth chamber, and then is discharged to a discharge port.
Description
technical field [0001] The present invention relates to a scrubber, and more particularly, to a scrubber capable of automatically controlling the pressure of a venturi. Background technique [0002] The epitaxy process (EPi Process) mainly uses Centura's EPi Process Tool. Among them, the main problem is the large amount of by-products in the form of viscous liquids. Hazardous by-products are present throughout the chamber outlet, the fore-line between the pump and the scrubber, the interior of the scrubber, and the like. The epitaxy process generates a large amount of harmful by-products during the process, and these harmful by-products exist throughout the entire process chamber from the back end of the process chamber to the exhaust line. The by-products are highly reactive, and in particular, the by-products react violently when exposed to air with moisture or subjected to impact. Byproducts come in a variety of forms, from viscous liquids (called Honey) to fine powder...
Claims
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IPC IPC(8): B01D47/10
CPCB01D47/10B01D2247/08B01D47/06B01D47/12B01D2247/04B01D47/063B01D53/78B01D53/79B01D2258/0216B01D2251/00B01D53/1412B01D53/1493B01D53/185B01D2252/103
Inventor 金东秀金哲焕
Owner MAT PLUS