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Liquid ejecting head and liquid ejecting apparatus

A technology of liquid ejection head and piezoelectric body layer, which is applied in printing and other directions, and can solve the problem of lowering the resonance frequency of the vibration plate

Pending Publication Date: 2022-07-29
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, there is a problem that when the Young's modulus of the vibrating plate is lowered in order to increase the ink weight of the liquid droplets ejected from the nozzle, the resonant frequency of the vibrating plate is also lowered, so that high-speed implementation cannot be performed. continuous ejection of ink droplets
[0005] In addition, such a problem exists not only in the ink jet recording head, but also in the liquid ejecting head ejecting liquid other than ink.

Method used

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  • Liquid ejecting head and liquid ejecting apparatus
  • Liquid ejecting head and liquid ejecting apparatus
  • Liquid ejecting head and liquid ejecting apparatus

Examples

Experimental program
Comparison scheme
Effect test

Embodiment approach 1

[0021] figure 1 It is an exploded perspective view of an ink jet recording head as an example of a liquid ejecting head in Embodiment 1 of the present invention. figure 2 A top view of the recording head. image 3 for figure 2 A-A' line sectional view. Figure 4 for figure 2 sectional view of the B-B' line. Figure 5 as well as Image 6 This is a cross-sectional view illustrating the internal stress of the vibration plate.

[0022] As shown in the drawings, an ink jet recording head 1 (hereinafter, also simply referred to as a recording head 1 ), which is an example of the liquid ejecting head according to the present embodiment, includes a flow channel as an example of a “substrate”. The substrate 10 is formed. The flow channel forming substrate 10 is composed of a silicon substrate, a glass substrate, an SOI (Silicon-On-Insulator: silicon-on-insulator) substrate, and various ceramic substrates. The flow channel forming substrate 10 of the present embodiment is mad...

Embodiment approach 2

[0084] Figure 7 This is a cross-sectional view of a main part of an ink jet recording head, which is an example of the liquid jet head according to Embodiment 2 of the present invention. In addition, the same code|symbol is attached|subjected to the same member as the above-mentioned embodiment, and the overlapping description is abbreviate|omitted.

[0085] like Figure 7 As shown, the concave portion 71 is formed with a depth that is halfway in the +Z direction, which is the thickness direction of the second diaphragm 52 . That is, on the bottom surface of the recessed portion 71 in the +Z direction, a part of the second diaphragm 52 is formed to remain. That is, a part of the thickness direction of the 1st diaphragm 51 and the 2nd diaphragm 52 is formed in the bottom surface of the recessed part 71. As shown in FIG.

[0086] Such concave portion 71 and diaphragm 50 can be formed by simultaneously removing part of second diaphragm 52 by over-etching when forming piezoele...

Embodiment approach 3

[0093] Figure 8 It is a plan view of a main part of an ink jet recording head which is an example of a liquid ejecting head according to Embodiment 3 of the present invention. Figure 9 for Figure 8 C-C' line sectional view. In addition, the same code|symbol is attached|subjected to the same member as the above-mentioned embodiment, and the overlapping description is abbreviate|omitted.

[0094] As shown in the drawings, in the flow channel forming substrate 10, a plurality of pressure chambers 12 are arranged in parallel along the X direction. The shape of the pressure chamber 12 when viewed in the +Z direction, that is, the shape of the opening in the +Z direction is a shape based on the rectangular shape in which the +Y direction is the longitudinal direction, and the long sides Both ends of the direction are made into a semicircular shape, so-called rounded rectangle shape (also called a racetrack shape by another name). That is, the pressure chamber 12 has an elonga...

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Abstract

The invention provides a liquid ejecting head and a liquid ejecting apparatus which improve the ink weight of liquid droplets ejected from nozzles and the resonance frequency of a vibration plate. A liquid ejecting head in which a plurality of pressure chambers, a vibrating plate including a first vibrating plate, a second vibrating plate, and a third vibrating plate, and a piezoelectric actuator are laminated in this order, the plurality of pressure chambers being provided side by side in a first direction in a plan view from a lamination direction of the vibrating plate and the piezoelectric actuator, and the plurality of pressure chambers being provided side by side in the second direction in a plan view from the lamination direction of the vibrating plate and the piezoelectric actuator. In the first direction, a portion where the piezoelectric layer and the third vibrating plate are laminated and a portion where the piezoelectric layer and the third vibrating plate are not laminated are provided in the first vibrating plate and the second vibrating plate, one of the first vibrating plate and the second vibrating plate has a compressive stress, and the other of the first vibrating plate and the second vibrating plate has a compressive stress. The other one has a tensile stress, and the Young's modulus of the third diaphragm is greater than the Young's modulus of the first diaphragm and the second diaphragm.

Description

technical field [0001] The present invention relates to a liquid ejecting head and a liquid ejecting device that eject liquid droplets, and more particularly, to an ink jet recording head and an ink jet recording device that eject ink as a liquid. Background technique [0002] As a representative example of the liquid ejecting head, an ink jet recording head that ejects ink droplets as a liquid is exemplified. As an ink jet recording head, for example, there is known a flow channel substrate provided with a pressure chamber communicating with the nozzles, and a piezoelectric actuator provided on one surface side of the flow channel substrate via a vibrating plate, and An ink jet recording head that ejects ink droplets from nozzles by changing the pressure of ink in a pressure chamber by a piezoelectric actuator. [0003] The piezoelectric actuator includes a first electrode formed on a vibrating plate of a flow channel forming substrate, a piezoelectric layer formed on the ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B41J2/045
CPCB41J2/045B41J2/14233B41J2002/14241B41J2002/14419B41J2002/14491
Inventor 外村修中山雅夫
Owner SEIKO EPSON CORP