Liquid ejecting head and liquid ejecting apparatus
A technology of liquid ejection head and piezoelectric body layer, which is applied in printing and other directions, and can solve the problem of lowering the resonance frequency of the vibration plate
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Embodiment approach 1
[0021] figure 1 It is an exploded perspective view of an ink jet recording head as an example of a liquid ejecting head in Embodiment 1 of the present invention. figure 2 A top view of the recording head. image 3 for figure 2 A-A' line sectional view. Figure 4 for figure 2 sectional view of the B-B' line. Figure 5 as well as Image 6 This is a cross-sectional view illustrating the internal stress of the vibration plate.
[0022] As shown in the drawings, an ink jet recording head 1 (hereinafter, also simply referred to as a recording head 1 ), which is an example of the liquid ejecting head according to the present embodiment, includes a flow channel as an example of a “substrate”. The substrate 10 is formed. The flow channel forming substrate 10 is composed of a silicon substrate, a glass substrate, an SOI (Silicon-On-Insulator: silicon-on-insulator) substrate, and various ceramic substrates. The flow channel forming substrate 10 of the present embodiment is mad...
Embodiment approach 2
[0084] Figure 7 This is a cross-sectional view of a main part of an ink jet recording head, which is an example of the liquid jet head according to Embodiment 2 of the present invention. In addition, the same code|symbol is attached|subjected to the same member as the above-mentioned embodiment, and the overlapping description is abbreviate|omitted.
[0085] like Figure 7 As shown, the concave portion 71 is formed with a depth that is halfway in the +Z direction, which is the thickness direction of the second diaphragm 52 . That is, on the bottom surface of the recessed portion 71 in the +Z direction, a part of the second diaphragm 52 is formed to remain. That is, a part of the thickness direction of the 1st diaphragm 51 and the 2nd diaphragm 52 is formed in the bottom surface of the recessed part 71. As shown in FIG.
[0086] Such concave portion 71 and diaphragm 50 can be formed by simultaneously removing part of second diaphragm 52 by over-etching when forming piezoele...
Embodiment approach 3
[0093] Figure 8 It is a plan view of a main part of an ink jet recording head which is an example of a liquid ejecting head according to Embodiment 3 of the present invention. Figure 9 for Figure 8 C-C' line sectional view. In addition, the same code|symbol is attached|subjected to the same member as the above-mentioned embodiment, and the overlapping description is abbreviate|omitted.
[0094] As shown in the drawings, in the flow channel forming substrate 10, a plurality of pressure chambers 12 are arranged in parallel along the X direction. The shape of the pressure chamber 12 when viewed in the +Z direction, that is, the shape of the opening in the +Z direction is a shape based on the rectangular shape in which the +Y direction is the longitudinal direction, and the long sides Both ends of the direction are made into a semicircular shape, so-called rounded rectangle shape (also called a racetrack shape by another name). That is, the pressure chamber 12 has an elonga...
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