Contact window mfg. method and structure thereof

Abstract

A manufacturing method for contact window and its structure, first a base plate is provided, a first conducting layer was formed on the base plate,a dielectric layer formed on the first conducting layer, and an opening of contact window formed in the dielectric layer, the first conducting layer is exposed. The next, an electric conduction nanometer particle layer is formed on the surface of the exposed first conducting layer. Then, a second conducting layer is formed inside the opening of conducting window, which covers the electric nanometer particle layer to form a contact window. At the bottom of contact window, an electric nanometer particle layer is formed to prevent the second conducting layer from producing stripping. The production cost of this method is lower than the known method.

Description

technical field [0001] The present invention relates to a manufacturing method and structure of a semiconductor element, and in particular to a manufacturing method and structure of a contact window. Background technique [0002] In the manufacturing process of liquid crystal displays, in order to electrically connect the conductive layers above and below the insulating layer, contact window openings are generally formed in the insulating layer by lithography and etching processes, so that the conductive layers above and below the insulating layer The conductive layer can be turned on. For example, the method for electrically connecting the pixel electrode in the pixel structure with the drain of the thin film transistor is to form a contact window opening in the dielectric layer using a lithography etching process before forming the pixel electrode, exposing the underlying drain. After the electrode is formed, the pixel electrode is plated, so that the opening of the conta...

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Problems solved by technology

[0005] The object of the present invention is to provide a method of manufacturing a contact window and its structure to solve the known problem that the metal layer under the contact window is in direct contact with the indium tin oxide film, which will cause its own redox reaction and cause the indium tin oxide film to peel off. question

[0006] Another object of the present invention is to provide a method for manufacturing a contact window and its structure, so as to improve the disadvantages of the high cost of the known method for solving the peeling off of the indium tin oxide film

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