Multifunction tridimension displacement laser interference measuring system
A technology of laser interferometry and measurement system, which is applied in the field of three-dimensional displacement laser interferometry system, can solve the problems that moiré interferometry and electronic speckle interferometry cannot be realized, and simultaneous measurement cannot be realized, and achieve the effect of compact structure and convenient use
Inactive Publication Date: 2007-03-14
TSINGHUA UNIV
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However, the first two devices are only suitable for moiré interferometry and can only realize the measurement of two displacement fields u and v in the plane, while the latter two are only suitable for speckle interferometry, and they cannot simultaneously measure u, v, w Three-dimensional displacement field, not to mention the two modes of moiré interferometry and electronic speckle interferometry to measure displacement
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[0022] As shown in Figure 1, the multifunctional three-dimensional displacement laser interferometry system of the present invention is mainly composed of a laser 1, a light splitting coupler 2 that can control light splitting to form three displacement fields, a three-dimensional interference optical path system 3, and an image acquisition camera system 4 1. It consists of 5 six-dimensional adjustable load frames, all of which are installed on a worktable. The three-dimensional interferometric optical system 3 is integrated in the dark box and fixed on the workbench through three lifting supports to make the system miniaturized. The laser 1 and the optical coupler 2 are fixed on the workbench by fastening screws, and are located on the same side of the three-dimensional interference optical system 3 . The six-dimensional adjustment load frame 5 and the image acquisition camera system 4 are respectively installed on the front and rear sides of the three-dimensional interferenc...
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The measuring system is composed of laser, image collection camera system, spectrum coupler, 3D interference optical system, and 6D adjustable loading frame. The measuring system provides functions of real time measurement in u, v, w three displacement fields with high accuracy in sensitivity of wavelength magnitude, possessing two measuring modes: gradation interference and electronic speckle interference. Adjustment in six degrees of freedom is realized by 6D adjustable loading frame so as to implement loading experiments of one-way pulling and pressing, and bending at three points providing features of easy of use, compact structure and high precision. Moreover, there is phase shift system. Measuring precision reaches to nano magnitude when phase shift technique is applied.
Description
technical field [0001] The invention relates to a three-dimensional displacement laser interferometric measurement system for component deformation and displacement testing, and belongs to the technical fields of photometric mechanics, engineering materials, and component deformation and displacement testing. Background technique [0002] At present, most of the displacement laser interferometry systems used in the prior art belong to the bulk structure temporarily built on the test bench, which cannot be applied to the on-site component deformation measurement. In response to this situation, some portable commercial laser interferometry systems have been introduced at home and abroad, including moiré interferometers and speckle interferometers. The well-known moiré interferometers include Photomechanics Co.'s two-dimensional moiré interferometer and Tianjin University's smart moiré interferometer (Chinese patent application 94118741.1). There is no essential difference in t...
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IPC IPC(8): G01B11/16G01B9/021
Inventor 戴福隆谢惠民方岱宁尚海霞刘战伟
Owner TSINGHUA UNIV