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Micro oxygen pump based on hydrogen peroxide solution decomposition

A hydrogen peroxide and oxygen technology, which is used in oxygen preparation, microstructure devices without moving elements, filtration and separation, etc. Effect

Inactive Publication Date: 2007-05-02
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
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Problems solved by technology

It has the characteristics of novel principle, simple structure and low manufacturing cost, and overcomes the disadvantages of weak driving ability and too small driving pressure of the heat pump

Method used

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  • Micro oxygen pump based on hydrogen peroxide solution decomposition

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Embodiment Construction

[0018] As shown in Fig. 1, the present invention is made up of two-layer structure, is respectively the silicone rubber base 2 that comprises pump cavity structure and microchannel and the glass substrate 3 that comprises heating electrode and sensing electrode, and glass substrate 3 passes ultraviolet ray The light irradiation package is arranged above the silicone rubber base 2, and the hydrogen peroxide pump chamber 4 is arranged in parallel in the silicon rubber base 2, and the hydrogen peroxide inlet microchannel 6 and the oxygen outlet microchannel are respectively arranged on the opposite sides of the hydrogen peroxide pump chamber 4. Channel 7, the hydrogen peroxide inlet microchannel 6 communicates with the hydrogen peroxide inlet 11, the end of the oxygen outlet microchannel 7 connects with the capillary microvalve 5, the other side of the capillary microvalve 5 communicates with the liquid storage chamber 8, and the lower side of the liquid storage chamber 8 A sample...

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Abstract

The micro oxygen pump based on the decomposition of hydrogen peroxide solution consists of silicone rubber substrate and glass substrate. Inside the silicone rubber substrate, there are parallel hydrogen peroxide solution pump cavities. On two sides of the hydrogen peroxide solution pump cavities, there are hydrogen peroxide solution inlet micro passage communicated with the hydrogen peroxide solution inlet and oxygen outlet micro passage with end connected to capillary micro valve with the other side communicated with the liquid storage cavity. There are also sample inlet micro passage below the liquid storage cavity and snaky micro passage connected to the liquid outlet. On the glass substrate, there are drive electrodes comprising micro heating electrodes set over the hydrogen peroxide solution pump cavities and micro sensing electrodes set inside the hydrogen peroxide solution pump cavities. The present invention has low power consumption and high continuous drive capacity, and can generate relatively high pressure.

Description

technical field [0001] The invention relates to a gas-liquid micro pump, in particular to a micro oxygen pump based on hydrogen peroxide decomposition. Used in the field of microelectromechanical systems. Background technique [0002] Micropumps are the core components to realize microfluidic control. Micropumps based on MEMS processing technology can generally be divided into two types according to the principle of the pump: mechanical and non-mechanical. According to the type of actuation, mechanical pumps can be divided into: piezoelectric, pneumatic, thermopneumatic, electrostatic and electromagnetic, etc. The working principle of these pumps is basically to use a relatively high voltage to actuate a membrane, which produces a reciprocating motion to drive the liquid along the microchannel. The advantage of the mechanical pump is that it can be applied to any liquid, and the flow rate is less affected by the properties of the liquid flow in the channel and the properti...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B81B1/00C01B13/02
Inventor 陈文元牛志强邵诗逸张卫平
Owner SHANGHAI JIAO TONG UNIV
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