Micro oxygen pump based on hydrogen peroxide solution decomposition

Abstract

The micro oxygen pump based on the decomposition of hydrogen peroxide solution consists of silicone rubber substrate and glass substrate. Inside the silicone rubber substrate, there are parallel hydrogen peroxide solution pump cavities. On two sides of the hydrogen peroxide solution pump cavities, there are hydrogen peroxide solution inlet micro passage communicated with the hydrogen peroxide solution inlet and oxygen outlet micro passage with end connected to capillary micro valve with the other side communicated with the liquid storage cavity. There are also sample inlet micro passage below the liquid storage cavity and snaky micro passage connected to the liquid outlet. On the glass substrate, there are drive electrodes comprising micro heating electrodes set over the hydrogen peroxide solution pump cavities and micro sensing electrodes set inside the hydrogen peroxide solution pump cavities. The present invention has low power consumption and high continuous drive capacity, and can generate relatively high pressure.

Description

technical field

[0001] The invention relates to a gas-liquid micro pump, in particular to a micro oxygen pump based on hydrogen peroxide decomposition. Used in the field of microelectromechanical systems. Background technique

[0002] Micropumps are the core components to realize microfluidic control. Micropumps based on MEMS processing technology can generally be divided into two types according to the principle of the pump: mechanical and non-mechanical. According to the type of actuation, mechanical pumps can be divided into: piezoelectric, pneumatic, thermopneumatic, electrostatic and electromagnetic, etc. The working principle of these pumps is basically to use a relatively high voltage to actuate a membrane, which produces a reciprocating motion to drive the liquid along the microchannel. The advantage of the mechanical pump is that it can be applied to any liquid, and the flow rate is less affected by the properties of the liquid flow in the channel and the properti...

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