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Short arc discharge lamp and light source equipment

A discharge lamp and short arc technology, which is applied in the field of short arc discharge lamps, can solve the problems of increasing the use of electricity for large-scale cooling metal capacity lamps, and achieve the effect of prolonging the residence time.

Inactive Publication Date: 2003-10-22
ORC MFG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

As a result, an increase in the cooling metal capacity of the luminaire involves an increase in the size of the luminaire and the use of electric power

Method used

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  • Short arc discharge lamp and light source equipment
  • Short arc discharge lamp and light source equipment
  • Short arc discharge lamp and light source equipment

Examples

Experimental program
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Effect test

Embodiment

[0048] The embodiments of the present invention will be used for further description below. Incidentally, the present invention is not limited to this embodiment. The discharge lamp used in the present invention is a short-arc discharge lamp. The outer diameter of the luminous tube is Φ82mm, the luminous length is 7mm, the amount of mercury enclosed is 20mg / cc, the rated electric power is 5KW, the discharge voltage is 50V, and the discharge current is 100A. On, the metal cap holder of the lamp is set on the cathode.

no. 1 example

[0050] In order to evaluate the position reproducibility of the discharge lamp mounting direction when the discharge lamp is mounted on a lamp, discharge lamps A1 to A9 having metal cap holders with cathodes of nine different shapes were prepared. Figure 7 The cross-sectional shapes of the metal cap holders of the cathodes of the discharge lamps A1 to A9 are shown. In addition, discharge lamp A1 is a conventional lamp, and discharge lamps A2 to A9 are lamps of the present invention.

[0051]The metal cap holding portion of the discharge lamp A1 is shaped without a positioning engagement portion for designating the installation position of the discharge lamp. The discharge lamps A2 to A9 have a shape having a positioning engagement portion for designating an installation position. In addition, on the side of the metal cap, an air introduction hole for cooling is provided at only one position at a height position of the same dimension from the end of the metal cap.

[0052] T...

no. 2 example

[0057] As an experiment for checking the cooling efficiency inside the metal cap, the number of openings for air introduction and air outlet on the side of the metal cap, and six types of discharge lamps B1 to B6 were prepared in order to analyze the inside of the metal cap during lighting. temperature for comparison. The metal cap is cooled by spraying cooling air from the air nozzles of the luminaire in only one direction. Used on internal foil and external wire bonding sites ( figure 1 The internal temperature of the metal cap is measured by a thermocouple attached to the external lead mounting part 10). Figure 8 and Figure 6 The measurement results are explained. Incidentally, the discharge lamps B1 to B3 are conventional lamps, and the discharge lamps B4 to B6 are lamps of the present invention.

[0058] As a result of the evaluation, the discharge lamp B1 (conventional lamp) having no opening had the highest temperature inside the metal cap. Furthermore, it was fo...

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Abstract

An electric discharge lamp without shortage of cooling resulting from poor positioning of the attachment direction of the electric discharge lamp and a fixed material included in a metal cap part, allowing no un-switching on the light of electric discharge lamp, breakage, and burst, is provided. Also, a light source equipment including the electric discharge lamp attached to a luminaire without increase in the cooling capacity of the luminaire accompanying a high light-utilization of the electric discharge lamp, allowing scaling-down or small electric power of the equipment is provided. A short are electric discharge lamp 1 comprises: metal cap maintenance part 14 provided for an attachment to the end portion of both metal caps 11 of the electric discharge lamp 1; a positioning engagement part provided in at least one of the circumferential position of both metal cap maintenance parts 14; and pluralities of opening holes 11a and 11b provided in the position which is un-countering on the side face of the both metal caps 11.

Description

technical field [0001] The present invention relates to a short-arc type discharge lamp capable of performing light irradiation processing on substrates such as semiconductor wafers, liquid crystal panels, and printed wiring boards, and a light source apparatus using the short-arc type discharge lamp. Background technique [0002] In conventional short-arc discharge lamps (hereinafter referred to as discharge lamps), in order to install the discharge lamp on the lamp of the light source device, the fixing metal or the electrical connection metal fixed to the sealing tube at both ends of the discharge lamp luminous tube by fixing materials (hereinafter referred to as the metal cap) is formed in a cylindrical shape. Also, a cylindrical metal cap holding portion (protrusion) is provided at the end of the metal cap, and a concave portion is provided in the lamp to determine positioning. This device works in order not to put tension on the lead wires coming out of the discharge ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F21S2/00F21V29/00F21Y101/00H01J5/50H01J61/02H01J61/52
CPCH01J61/523A01G9/021A01G9/0297A01G9/045
Inventor 横井実宫泽正明桑畑宏藤森昭芳
Owner ORC MFG
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