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Micro-gyroscope capable of regulating overcoming translational acceleration speed
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A micro gyroscope, acceleration technology, applied in gyroscope/steering sensing equipment, speed/acceleration/shock measurement, linear/angular velocity measurement and other directions, can solve the problem of sensing the movement of the gimbal
Inactive Publication Date: 2004-05-19
SAMSUNG ELECTRO MECHANICS CO LTD
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Problems solved by technology
Translational acceleration, especially in the Y-axis direction, will cause the sensing gimbal 18 to move and thus sense unwanted signals
Method used
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Embodiment 1
[0075] see Figure 5 , which shows a micro gyroscope 100' according to a preferred embodiment of the present invention.
[0076] The micro-gyroscope 100' according to the first preferred embodiment of the present invention is provided with: an elongated oscillation balance frame 112', which is made to suspend above the wafer 111' so as to oscillate in the horizontal direction, that is, the X-axis direction; The first comb-shaped body 114' includes a plurality of first comb teeth 114a, 114b, which are arranged on the upper and lower sides of the vibration balance frame 112' at predetermined intervals ( Figure 5 The upper and lower sides of middle); driving electrode unit 116', which includes four driving electrode devices 116a, 116b, 116c and 116d, and these driving electrode devices have a plurality of second comb teeth 117a, 117b, 117c and 117d, these comb teeth Provided at a predetermined interval between the first comb teeth 114a, 114b, so that the oscillation balance fra...
Embodiment 2
[0087] see Figure 6 , which shows a micro gyroscope 100' according to another preferred embodiment of the present invention.
[0088] According to the microgyroscope 100 " of this embodiment and Figure 5 The illustrated first embodiment of the present invention is similar except that the sensing gimbal 118" is divided into two parts 118a, 118b, and the sensing electrode unit 122" is arranged between the two parts 118a, 118b.
[0089] The sensing gimbal 118" is provided with a plurality of third comb teeth 120a', 120b', 120c, 120d. In the sensing direction, these comb teeth are respectively located on the upper and lower sides of the corresponding parts 118a, 118b ( Figure 6 ).
[0090] The sensing electrode unit 122" includes first and second sensing electrodes 122a and 122b, which are respectively disposed in two parts 118a and 118b.
[0091] The first and second sensing electrodes 122a, 122b are provided with a plurality of electrode comb units 121a', 121b', 121c, 121d...
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Abstract
A microgyroscope tunable against an external translational acceleration includes an oscillating mass floating over a wafer to oscillate in a first direction, a driving electrode for oscillating the oscillating mass, a sensing mass oscillating together with the oscillating mass and concurrently moving in a second direction, wherein the second direction is perpendicular to the first direction, a sensing electrode for sensing a motion of the sensing mass, and a sensing electrode supporting portion for movably securing the sensing electrode so that the sensing electrode can move in the second direction with the sensing mass. A microgyroscope according to the present invention is able to prevent sensing signals due to an external disturbance, such as noise or impulse.
Description
technical field [0001] The invention relates to a micro gyroscope for measuring angular velocity. More specifically, the present invention relates to a micro-gyroscope that is less susceptible to external interference, which can make sensing electrodes and corresponding sensing gimbals resonate in the same direction and / or in the same measurement direction The frequency is synchronized, thereby eliminating redundant signal output due to the presence of external translational accelerations, such as those caused by disturbances such as noise and vibration. Background technique [0002] A gyroscope is a measuring device that detects angular velocity, and is currently used as a core component for precise navigation of ships and aircraft. Recent developments in the field of micro-electro-mechanical systems (MEMS) technology have made possible the application of gyroscopes in car navigation devices and the use of gyroscopes as hand-oscillation compensating devices in high-perform...
Claims
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