Method for collective production of optical filter components and element wafer
A technology of optical filtering and components, used in optical components, coupling of optical waveguides, instruments, etc.
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[0022] figure 1 with figure 2 The optical filter element 1 fabricated on a wafer is shown. The optical filter element 1 is fabricated on a substrate 2, in which only the part carrying the element 1 is shown. In practice, a large number of components are fabricated on one or the same wafer, for example, the components are placed on the substrate 2 identical to each other and side by side. The active part of element 1 includes Bragg mirrors 3 and 4 separated by an air gap 5. The mirrors 3 and 4 are connected to the main part 6 and attached to the substrate 2 through the arm 7, for example, figure 2 As shown, there are 4 arms 7. The arm 7 provides a certain degree of flexibility for the mirrors 3 and 4, and is used to adjust the thickness of the air gap 5, thereby adjusting the central wavelength filtered by the element 1. The active part of the element 1 is covered with a light-transmitting cover layer 8. A spacer 9 keeps a certain distance between the cover layer 8 and the mirr...
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Abstract
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