Planar direct drive unit comprising a position measuring system
A technology of driving device and measuring system, which can be used in electromechanical devices, propulsion systems, electric components, etc., and can solve problems such as increased bearing clearance
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[0029] exist figure 1 The planar direct drive shown in includes a passive unit 1 which has a sliding surface 2 on its upper side. On the sliding surface 2 , for example, a cross-shaped toothing is formed, which consists of magnetizable teeth and non-magnetizable tooth grooves. The general construction of such direct drives is known to those skilled in the art, so a detailed description of the function of the planar motor will not be given here.
[0030] Furthermore, the direct drive has a first active unit 3 , which is displaceable on the sliding surface 2 in at least two directions of movement when supplied with a suitable current. For a movement despite the magnetic attraction between the active unit 3 and the passive unit 1 , a bearing unit is required, by means of which the bearing gap 4 is maintained during operation of the direct drive. Air bearings (not shown), which preferably create an air gap between the sliding surface 2 and the active unit 3 , are suitable for th...
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