Ink-jet coating apparatus and cleaning method of ink-jet head
A coating device and inkjet technology, applied in printing and other directions, can solve the problems of mixing elastomer powder into the solution, difficult to remove the coating solution, insufficient scraping operation, etc., so as to improve the wiping performance, prevent friction, improve the coating quality effect
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[0018] Figure 1 to Figure 6 The illustrated inkjet application device 10 has a substantially cuboid-shaped base 1 . Legs 2 are respectively provided at predetermined positions on the lower surface of the base 1 to support the base 1 horizontally.
[0019] A mounting plate 3 is provided on the upper surface of the above-mentioned base 1 . Guide rails 4 are respectively provided on the mounting plate 3 along the length direction. A substantially rectangular plate-shaped transfer table 5 is slidably supported on the upper surface side of these guide rails 4 by sliding members 6 provided parallel to both sides of the lower surface thereof.
[0020] A drive device (not shown) is connected to the transfer table 5, and the transfer table 5 can be moved along the guide rail 4 by operating the drive device.
[0021] A substrate W such as a glass substrate or a semiconductor wafer is detachably held on the upper surface of the transfer table 5 by a holding member such as an electros...
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