Surface roughness and/ or contour shape measuring apparatus

A surface roughness and measuring device technology, applied in mechanical roughness/irregularity measurement, measuring device, mechanical counter/curvature measurement, etc., can solve problems affecting the accuracy of measurement, limited objects to be measured, difficulties, etc.
CN1851400AInactive Publication Date: 2006-10-25TOKYO SEIMITSU
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
TOKYO SEIMITSU
Publication Date
2006-10-25
Estimated Expiration
Not applicable · inactive patent

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Abstract

A surface roughness and / or contour shape measuring apparatus for measuring the surface shape of a work measurement surface by moving a probe supported on a cantilever and kept in contact with the work measurement surface and by detecting the displacement amount of the probe is disclosed. The surface roughness and the contour shape of a stepped work bottom portion having bank portions and the bottom portion can be easily measured. The surface roughness and / or contour shape measuring apparatus (1) includes a moving unit (8) for moving the work and the probe (9) relatively to each other in the direction (X) perpendicular to both the longitudinal direction (Z) of the probe (9) and the longitudinal direction (Y) of the cantilever (7).
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Description

technical field

[0001] The present invention relates to a surface roughness and / or profile shape measuring device, or in particular to a surface roughness and / or profile shape measuring device for measuring the surface roughness and / or profile shape of an object in two directions. Background technique

[0002] In the surface roughness and / or profile shape measuring device, a pickup having a probe moves along the surface of an object to be measured (hereinafter generally referred to as a "workpiece"), and the displacement amount of the probe is converted into an electrical signal and Read by a computer or similar device to measure the surface roughness and / or contour shape of the workpiece. Such a surface roughness and / or profile shape measuring device is disclosed in Unexamined Japanese Patent Application No. 2002-107144. figure 1 The basic configuration of a conventional surface roughness and / or profile shape measuring device is shown.

[0003] The surface roughness and / o...

Claims

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