Magnetic sensor and its manufacturing method

A magnetic sensor and magnetoresistive technology, applied in the direction of converting the sensor output, the magnitude/direction of the magnetic field, the resistance of the magnetic field control, etc., can solve the problems of manufacturing difficulties, rising manufacturing costs, and narrow spacing of magnetoresistive elements, to prevent spacing The effect of narrowing down, reducing adverse effects, and preventing the decrease in the degree of freedom of arrangement
CN1906466AInactive Publication Date: 2007-01-31SANKYO SEIKI MFG CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
SANKYO SEIKI MFG CO LTD
Publication Date
2007-01-31
Estimated Expiration
Not applicable · inactive patent

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Abstract

A magnetic sensor comprises magnetoresistor thin films used in view of improvement of identification accuracy of operation of the magnetic sensor so as to prevent degradation of the degree of freedom of arrangement attributed to the narrow intervals between the magnetoresistor thin films. The number of magnetoresistive elements for canceling the harmonics can be increased to an extent that the production of the magnetic sensor does not became difficult while flexibly adjusting the intervals between magnetoresistive elements. The thermal characteristics are uniformed and the identification accuracy is improved. The magnetic sensor has magnetoresistance pattern where magnetoresistor thin films are formed on a substrate, and the magnetoresistance pattern is composed of A-phase and B-phase magnetoresistance patterns which output two signals having phases which are different by 90 DEG. The magnetic sensor is characterized in that the magnetoresistance pattern is formed by combining two substrates.
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Description

Technical field

[0001] The present invention relates to a magnetic sensor that detects displacement, such as movement amount, position, angle, etc. of a movable object to be detected, and a manufacturing method thereof. In particular, it relates to a magnetic sensor that can improve the degree of freedom of arrangement of a magnetoresistive film formed on a magnetoresistive pattern of a magnetic sensor. Sensors and methods of making the same. Furthermore, the present invention relates to a magnetic sensor capable of eliminating harmonic components superimposed on the fundamental wave component of a detected actual output signal by arranging a magnetoresistive element. Background technique

[0002] Conventionally, a magnetic sensor is used as a sensor for detecting the displacement of a movable object to be detected. One form of such a magnetic sensor is to form, for example, a multipolar magnetized layer that is magnetized at a certain distance on a movable object to be det...

Claims

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