Magnetic sensor and its manufacturing method

Abstract

A magnetic sensor comprises magnetoresistor thin films used in view of improvement of identification accuracy of operation of the magnetic sensor so as to prevent degradation of the degree of freedom of arrangement attributed to the narrow intervals between the magnetoresistor thin films. The number of magnetoresistive elements for canceling the harmonics can be increased to an extent that the production of the magnetic sensor does not became difficult while flexibly adjusting the intervals between magnetoresistive elements. The thermal characteristics are uniformed and the identification accuracy is improved. The magnetic sensor has magnetoresistance pattern where magnetoresistor thin films are formed on a substrate, and the magnetoresistance pattern is composed of A-phase and B-phase magnetoresistance patterns which output two signals having phases which are different by 90 DEG. The magnetic sensor is characterized in that the magnetoresistance pattern is formed by combining two substrates.

Description

Technical field [0001] The present invention relates to a magnetic sensor that detects displacement, such as movement amount, position, angle, etc. of a movable object to be detected, and a manufacturing method thereof. In particular, it relates to a magnetic sensor that can improve the degree of freedom of arrangement of a magnetoresistive film formed on a magnetoresistive pattern of a magnetic sensor. Sensors and methods of making the same. Furthermore, the present invention relates to a magnetic sensor capable of eliminating harmonic components superimposed on the fundamental wave component of a detected actual output signal by arranging a magnetoresistive element. Background technique [0002] Conventionally, a magnetic sensor is used as a sensor for detecting the displacement of a movable object to be detected. One form of such a magnetic sensor is to form, for example, a multipolar magnetized layer that is magnetized at a certain distance on a movable object to be det...

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Problems solved by technology

However, in the invention described in Patent Document 1, since the number of magnetoresistive elements that cancel each other's harmonics is fixed, the intervals between the magnetoresistive elements are extremely narrow as a whole, and there is a problem. The problem that manufacturing becomes difficult and manufacturing cost rises

[0019] In this way, from the viewpoint of uniformity of thermal performance and improvement of recognition accuracy, it is preferable to increase the number of magnetoresistive elements for canceling each harmonic. However, in the invention described in Patent Document 1, Since the number of magnetoresistive elements that cancel each other's harmonics is fixed, as a result, if the number of magnetoresistive elements is increased, manufacturing will become difficult and manufacturing costs will increase

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