Etchingmachine cluster controller and process module controller communication system and method

A cluster controller and process module technology, applied in the field of microelectronics, can solve problems such as accuracy and real-time performance are not ideal, and achieve the effect of overcoming the closed problem

Active Publication Date: 2007-03-28
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD +1
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  • Abstract
  • Description
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  • Application Information

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Problems solved by technology

But the accuracy and real-ti

Method used

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  • Etchingmachine cluster controller and process module controller communication system and method
  • Etchingmachine cluster controller and process module controller communication system and method

Examples

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Embodiment Construction

[0061] The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0062] As shown in FIG. 1 , the communication module of the present invention includes an attribute data service interface, a data item data service interface, a warning data service interface, and an intermediate document.

[0063] As shown in Figure 2, the method of the present invention comprises:

[0064] 1) Preparation

[0065] A) start the web server to provide network services;

[0066] B) Start the control program of the process module controller, and perform necessary pretreatment on the process module controller, such as preheating the process chamber;

[0067] C) Four XML documents are generated on the controller side of the process module to store attributes, instructions, data items and warning information respectively.

[0068] D) start the cluster controller;

[0069] 2) Network test connection works

[0070] a) The...

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Abstract

This method includes the group controller (GC), the technology module controller (TMC), the Ethernet connecting GC and TMC and the comm. module, which transfers the control info and state info between GC and TMC via the Ethernet. The method is that: (1) prepare step, (2) net test connect step, (3) the practical comm. step. When it works normally, GC interacts info and instructions with TMC via Web server.

Description

technical field [0001] The invention relates to the field of microelectronics, in particular to an information communication system between an integrated circuit etching machine (commercial machine) cluster controller (CTC) and a process module controller (PMC). The invention also relates to a communication system method between the group controller of the integrated circuit etching machine and the process module controller. Background technique [0002] In the 200mm integrated circuit etching machine (commercial machine) equipment, it is mainly divided into three parts: the cluster controller (CTC), the process module controller (PMC) and the transmission module controller (TMC). Control of room equipment and control of robotic arm transfer equipment. Among them, CTC, as the core control device, coordinates and controls PMC and TMC, so that the three parts can cooperate well to complete the etching task. [0003] In the control relationship, the relationship between CTC a...

Claims

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Application Information

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IPC IPC(8): H04L12/00
Inventor 徐华丁力贾培发王家廞赵雁南
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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