Molecular detection using an optical waveguide fixed to a cantilever
a technology of optical waveguide and cantilever, which is applied in the field of detection of molecules, can solve the problems of many known molecular detection techniques that are difficult or impossible to perform, and many molecular detection techniques are limited, so as to facilitate the immobilization of the receptor, enhance bonding, and improve light transmission through the waveguide
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[0097] The invention is now described with reference to the following Examples. These Examples are provided for the purpose of illustration only, and the invention is not limited to these Examples, but rather encompasses all variations which are evident as a result of the teaching provided herein.
[0098] Fabrication of a Multiple Cantilever Detector
[0099] This example describes how a detector described herein can be fabricated.
[0100] A double-sided polished silicon wafer having a substantially uniform thickness of about 250 micrometers is used as a substrate. The silicon substrate is immersed in a boiling 6:1:1 mixture of distilled, de-ionized water (DDW):ammonium hydroxide:hydrogen peroxide. After rinsing, the substrate is immersed in a boiling bath of a 6:1:1 mixture of DDW:hydrochloric acid:hydrogen peroxide in order to clean the surface thereof. After rinsing with DDW, the wafer is immersed in concentrated hydrofluoric acid for 5 minutes. The wafer is rinsed again with a copio...
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