Method of manufacturing mirror support post of micromirror device using electro-plating process
a micromirror and electroplating technology, applied in the direction of optics, electrolytic processes, optical elements, etc., can solve the problem of always dark central portion of one pixel, and achieve the effect of improving light reflection efficiency and contrast ratio
Inactive Publication Date: 2007-08-30
KOREA ADVANCED INST OF SCI & TECH
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Benefits of technology
The present invention aims to enhance the light reflection efficiency and contrast ratio of a micromirror device by creating a perfectly flat mirror surface through the use of a plating process. The invention provides methods for manufacturing a mirror support post by forming a seed electrode on a substrate, adding a lower electrode, a sacrificial layer, and a mirror support post formation region, and using an electro-plating process to create the mirror support post. The resulting mirror support post has a flat surface and the same height as the sacrificial layer. The invention also provides a conducting layer for forming the hinge and yoke of the device. Overall, the invention improves the performance of the micromirror device by enhancing light reflection efficiency and contrast ratio.
Problems solved by technology
Furthermore, a central portion within one pixel is always dark.
Method used
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[0028] These and other objects of the present application will become more readily apparent from the detailed description given hereinafter. However, it should be understood that the detailed description and specific examples, while indicating preferred embodiments of the invention, are given by way of illustration only, since various changes and modifications within the spirit and scope of the invention will become apparent to those skilled in the art from this detailed description.
[0029] The present invention will now be described in detail in connection with preferred embodiments with reference to the accompanying drawings.
[0030]FIG. 2 is a dismantled perspective view schematically showing the construction of a micromirror device according to the present invention.
[0031] As shown in FIG. 2, the micromirror device compises a mirror 20, a substrate 21, a plurality of electrodes 22, a plurality of cantilever support posts 23, a plurality of cantilevers 25 and a plurality of mirro...
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Abstract
An embodiment of the present invention relates to a digital micromirror device. More particularly, an embodiment of the present invention relates to a method of manufacturing a digital micromirror device having a perfectly flat mirror surface, wherein a hole of a mirror surface from which light is reflected is obviated by forming a mirror support post portion using an electro-plating process, unlike the related art digital micromirror device in which the hole is formed at the center of the mirror surface, thereby degrading the reflection efficiency of light.
Description
BACKGROUND OF THE INVENTION [0001] 1. Field of the Invention [0002] The present invention relates to a digital micromirror device, and more particularly, to a method of manufacturing a digital micromirror device having a perfectly flat mirror surface, in which the hole of a mirror surface from which light is reflected is obviated by forming a mirror support post portion using an electro-plating process, unlike the related art digital micromirror device in which a hole is formed at the center of the mirror surface so that the reflection efficiency of light is degraded. [0003] 2. Background of the Related Art [0004]FIG. 1 is a cross-sectional view of a micromirror device in the related art, which is cut on a center line. [0005] As shown in FIG. 1, the digital micromirror device was first developed by Texas Instruments Incorporated (U.S.). An example of the prior art micromirror device is disclosed in U.S. Pat. No. 5,535,047 (issued on Jul. 09, 1996 entitled “Active Yoke Hidden Hinge D...
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IPC IPC(8): C25D1/10
CPCC25D5/022C25D7/08C25D5/48
Inventor JEON, JIN-WANKIM, DAE-HYUNYOON, JUN-BOLIM, KOENG SU
Owner KOREA ADVANCED INST OF SCI & TECH