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Pressure-based fluid flow sensor

a technology of fluid flow sensor and diaphragm, which is applied in the direction of volume/mass flow by dynamic fluid flow effect, measurement devices, instruments, etc., can solve the problem of not always knowing the density of materials, and achieve the effect of increasing the pressure on the diaphragm and increasing the deflection of the diaphragm

Inactive Publication Date: 2010-01-28
HONEYWELL INT INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

The invention is a sensor that measures the flow of fluid by using a diaphragm with a special feature that increases the pressure on the diaphragm. This results in a larger deflection of the diaphragm, which is detected by a sensing structure. The sensing structure generates an electrical signal that is proportional to the pressure on the diaphragm. This design allows for accurate and reliable measurement of fluid flow rates.

Problems solved by technology

However, the density of the material is not always known, such as in the case the composition of the fluid is unknown.

Method used

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  • Pressure-based fluid flow sensor

Examples

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[0034]The examples provided below are non-limiting examples provided to only show particular embodiments of the present invention. Unless noted otherwise, the fluid was air and, the air flow was 1 m / sec, and the diaphragm was a silicon diaphragm 16 μm thick, and had a length and width of 1.7 mm. The sensing structure comprised piezoresistors. Simulations used Ansys software (Ansys, Inc. 275 Technology Drive Canonsburg, Pa. 15317. Reference data was generated by simulating air flow over a conventional flat diaphragm.

[0035]FIGS. 6A and B show the diaphragm deflection and Von Mises stress produced by the air flow, respectively. FIGS. 7A and B show the diaphragm deflection and Von Mises stress produced by the air flow over a diaphragm with a bump according to an embodiment of the invention. The dimensions of the bump were 600 μm width (in the flow direction), 250 μm length (perpendicular to the flow direction) and 100 μm height. The flow around the bump produces a larger pressure in thi...

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Abstract

A volumetric fluid flow sensor (100) includes a flow channel (120) for flowing a fluid therein; and a diaphragm (110) having an outer surface within the flow channel (120). The diaphragm (110) includes at least one flow disrupting feature mechanically coupled to or emerging from the outer surface of the diaphragm (110). A sensing structure (126) is coupled to the diaphragm (110) for generating a sensing signal responsive to a pressure signal on the diaphragm (110).

Description

FIELD OF THE INVENTION[0001]Embodiments of the present invention relate to diaphragm-based fluid flow sensors.BACKGROUND[0002]Both gas and liquid flow can be measured in volumetric or mass flow rates (such as liters per second or kg / s). These measurements can be converted between one another if the density of the material is known. However, the density of the material is not always known, such as in the case the composition of the fluid is unknown.[0003]Volumetric flow sensors can be embodied as mechanical flow meters including rotometers and pith-ball indicators. Such mechanical flow meters are relatively large mechanical assemblies. Monolithic volumetric flow sensors are available that create a pressure differential from fluid flow normal to a planar stress-gauge diaphragm with a hole in it. Such a sensor, commonly referred to as an orifice plate, is placed in the flow and constricts the flow. Monolithic volumetric flow sensors use the same principle as the venturi meter in that t...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): G01F1/38
CPCG01F1/38G01F1/28
Inventor KILIAN, WAYNEBECK, SCOTT EDWARDMORALES, GILBERTO
Owner HONEYWELL INT INC