Operation number-counting piezoelectric dispenser

a piezoelectric dispenser and number-counting technology, which is applied in the direction of positive displacement liquid engines, machines/engines, instruments, etc., can solve the problems of inaccurate liquid dispensing amount, inability to accurately dispense liquid, and loss of fatigue, so as to prevent process loss and defective products, and improve productivity

Active Publication Date: 2015-10-22
PROTEC CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

[0012]According to the operation number-counting piezoelectric dispenser of the inventive concept, damages to a piezoelectric actuator may be predicted and the piezoelectric actuator may be replaced before the damages are caused, thereby preventing process loss and defective products and improving productivity.

Problems solved by technology

When a ceramic piezoelectric actuator as described above is used for a long period time, fatigue destruction is generated.
If fatigue destruction is generated in a piezoelectric actuator during an operation of dispensing a liquid to a semiconductor device by using a piezoelectric pump, the liquid may not be dispensed or a dispensing amount of the liquid may be not accurate and process defects may be caused.

Method used

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  • Operation number-counting piezoelectric dispenser

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Embodiment Construction

Technical Problem

[0010]The inventive concept provides an operation number-counting piezoelectric dispenser capable of predicting damages to a piezoelectric actuator before the damages are caused.

Technical Solution

[0011]According to an aspect of the inventive concept, there is provided an operation number-counting piezoelectric dispenser including: a pump body; a lever that is rotatably installed with respect to a hinge axis installed in the pump body; a piezoelectric actuator installed in the pump body and having a tip portion that is contactable to the lever as a length of the piezoelectric actuator is increased when a voltage is applied to the piezoelectric actuator to press and rotate the lever with respect to the hinge axis; a valve rod that is liftably connected to the lever according to rotation of the lever; a valve body including a storing unit, into which a tip portion of the valve rod is inserted and in which a liquid is stored, an inlet, through which the liquid flows in...

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Abstract

Provided is an operating number-counting piezoelectric dispenser including a piezoelectric pump dispensing a liquid by using a piezoelectric element as an actuator. According to the operating number-counting piezoelectric dispenser, damages to a piezoelectric actuator may be predicted and the piezoelectric actuator may be replaced before the damages are caused, thereby preventing process loss and defective products and improving productivity.

Description

CROSS-REFERENCE TO RELATED APPLICATIONS[0001]This application is a Continuation of PCT International Application No. PCT / KR2014 / 007471 filed on Aug. 12, 2014, which claims priority under 35 U.S.C §119(a) to Korean Patent Application No. 10-2013-0096741, filed on Aug. 14, 2013. Each of the above application(s) is hereby expressly incorporated by reference, in its entirety, into the present application.TECHNICAL FIELD[0002]The inventive concept relates to an operation number-counting piezoelectric dispenser, and more particularly, to a dispenser including a piezoelectric pump dispensing a liquid by using a piezoelectric element as an actuator.BACKGROUND ART[0003]A dispenser supplying a predetermined amount of liquid that is in liquid form, such as water, oil, or resin is used in various fields such as in a semiconductor process or in the medical field.[0004]Particularly in a semiconductor process, a dispenser is frequently used in an underfill process to fill a package of a semiconduc...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): G06M1/10F04B49/06F04B17/00H01L21/56G07C3/02
CPCG06M1/108H01L21/563F04B49/06F04B17/003G07C3/02B05C5/0225F04B17/03F04B43/046F05B2210/11G07C3/08Y10S417/00
Inventor HONG, SEUNG MINLEE, HANSUNGLEE, YONG HUNKIM, MIN SUN
Owner PROTEC CO LTD
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