Optical deflector

a deflector and optical technology, applied in the field of optical deflectors, can solve the problems of deteriorating accuracy of detection of angular displacement (inclination) of the mirror surface, being susceptible to the influence of a surrounding temperature distribution, etc., and achieve the effect of accurately detecting the angular displacement of the mirror surface and reducing the different temperature drift of each resistor elemen
US7535334B2Active Publication Date: 2009-05-19OLYMPUS CORP
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Patent Information

Authority / Receiving Office
US · United States
Patent Type
Patents(United States)
Current Assignee / Owner
OLYMPUS CORP
Publication Date
2009-05-19

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Abstract

The present invention provides an optical deflector capable of reducing a temperature drift of a strain gauge due to a temperature gradient, and detecting with high accuracy an angular displacement of a mirror surface. The optical deflector includes a movable plate, two fixed portions which are disposed at an outer side of the movable plate, two elastic supporting members which are disposed to be substantially symmetric about a center line of the movable plate, and which connect the movable plate and the two fixed portions, an angular-displacement detecting portion having a Wheatston bridge as a measuring portion which includes two active resistors, and two reference resistors, and detects an angular displacement of the movable plate, and at least one resistor element is provided on the elastic supporting portion. All of the four resistor elements are in an isothermal characteristics area.
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Description

CROSS-REFERENCE TO RELATED APPLICATION

[0001] The present application is based upon and claims the benefit of priority from the prior Japanese Patent Application No. 2004-361208 filed on Dec. 14, 2004; the entire contents of which are incorporated herein by reference.BACKGROUND OF THE INVENTION

[0002] 1. Field of the Invention

[0003] The present invention relates to an optical deflector, and in particular to an optical deflector which includes an angular-displacement detecting portion.

[0004] 2. Description of the Related Art

[0005] In recent years, an optical deflector which is manufactured by using a micro machine technology in which a semiconductor manufacturing technology is applied has been drawing attention. For example, in Japanese Patent Application Laid-open Publication No. Hei 5-119280, an optical deflector which is used in a scanner of a projection display and a laser printer, has been disclosed.

[0006] FIG. 12 denotes a structure of an optical deflector disclosed in Japanese Patent ...

Claims

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