Electron-emitting device, electron source, image display apparatus and television apparatus
a technology of electron-emitting devices and electron-emitting devices, which is applied in the manufacture of electrode systems, electric discharge tubes/lamps, and discharge tubes luminescnet screens. it is difficult to lower the drive voltage of the electron-emitting devices
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first embodiment
of Electron-Emitting Device
[0051]FIG. 1A and FIG. 1B are exemplary diagrams showing the structure of the electron-emitting device according to the first embodiment. FIG. 1A shows a schematic cross sectional view of the device, while FIG. 1B shows a schematic plan view thereof. FIG. 1A is a cross sectional view taken along a line A-A′ of FIG. 1B.
[0052]In FIG. 1A and FIG. 1B, the electron-emitting device includes a substrate (base member) 1, a first electrode 2 which is a cathode electrode, a second electrode 3 which is a gate electrode, an insulating layer 4 formed between the first and second electrodes 2 and 3, and an electron-emitting member 5 which emits an electron. In this embodiment, the second electrode 3 has a circular opening with a width of “W” (diameter of the circle). The third electrode 6 which is an anode electrode is disposed at a distance “h” from the second electrode 3 of the electron-emitting device. A selection signal output from the scanning circuit 403 is applie...
second embodiment
of Electron-Emitting Device
[0059]FIG. 2A and FIG. 2B are exemplary diagrams showing the structure of an electron-emitting device according to this embodiment. FIG. 2A shows a schematic cross sectional view of the device, and FIG. 2B shows a schematic plan view thereof. FIG. 2A is a cross sectional view taken along a line A-A′ of FIG. 2B. The electron-emitting device shown in FIG. 2A and FIG. 2B has a rectangular form. Note that a symbol “W” denotes the width of its opening (corresponding to the dimension in the short-side direction). When the opening has a square form, its one length (width) corresponds to “W”. Like the electron-emitting device of the first embodiment, the opening may have a circular or oval form.
[0060]In FIG. 2A and FIG. 2B, the use of the same symbols as those of FIG. 1A and FIG. 1B indicates the identical members, and the identical members are not repeatedly explained again, while only those different parts of the identical members are described. In the electron-...
example 1
[0121]In this example, the description will now be made to the electron-emitting device including the circular gate electrode 3 and a circular opening shown in FIG. 8. The cross sectional view of this device has the same structure as that shown in FIG. 1A.
[0122]With reference to FIG. 7A to FIG. 7E, the description will now be made to a method of manufacturing the electron-emitting device of the present example. FIG. 7A to FIG. 7E and FIG. 8 show the case wherein the one electron-emitting device includes one single cathode electrode. In this example, a plurality of electron-emitting devices are formed as shown in FIG. 9. In fact, one thousand cathode electrodes 2 are arranged, and the swing voltage Vswing is measured and evaluated. The distance W′ between the centers of the openings is equal to or greater than 30 μm. As shown in FIG. 9, the width W″ of the area around the opening is equal to or greater than 10 μm.
[0123]As described in the above embodiments, when the area Sg of the ga...
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