Probe for high speed scanning
A sensor and probe technology, applied in the field of scanning probes, which can solve problems such as limited working range
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[0047] A coordinate measuring machine (CMM) is shown in FIG. 1 and includes a mechanical table 4 on which a workpiece 8 can be placed. An analog probe 5 with a deformable stylus 9 and workpiece contact tip 12 is mounted on quill 6 of machine 4 . The quill 6 and the probe 5 can move along the X, Y and Z directions under the action of the X, Y and Z drives of the CMM, and the X, Y and Z drives of the CMM are controlled by a computer. The CMM's X, Y and Z scales display the instantaneous coordinates of the position of the quill shaft on which the probe is mounted in three dimensions. Signals from the probe indicating probe stylus deflection are combined with readings from the CMM's X, Y, and Z scales to calculate the position of the stylus tip and thus the surface of the workpiece.
[0048] The computer contains programs that cause the probe to scan the surface of the workpiece.
[0049] The probe will now be described in more detail with reference to FIG. 2 . The probe 5 has ...
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