Heating resistance, diaphragm, base plate using the same for ink jetting head, ink jetting head and ink jetting device

An inkjet device and inkjet head technology, applied in printing and other directions, can solve the problems of no record or prompt, no mention of meeting durability, etc., and achieve the effects of energy saving, small current consumption value and high energy efficiency

Inactive Publication Date: 2007-12-26
CANON KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, there is no description or suggestion in these publications regarding the effective atomic composition of the heating resistor as the electrothermal transducer of the inkjet head, and in particular no mention of satisfying durability. sexual structure

Method used

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  • Heating resistance, diaphragm, base plate using the same for ink jetting head, ink jetting head and ink jetting device
  • Heating resistance, diaphragm, base plate using the same for ink jetting head, ink jetting head and ink jetting device
  • Heating resistance, diaphragm, base plate using the same for ink jetting head, ink jetting head and ink jetting device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0118] (Evaluation of film production stability)

[0119] The production stability of the CrSiN film was evaluated. The target composition is Cr 30 Si 70(at%), the power is 350W, under the main sputtering condition where the gas pressure is 0.5Pa, the nitrogen partial pressure is changed to form a thin film, and the relationship between the nitrogen partial pressure and the resistivity is obtained. (Refer to FIG. 4 for the sputtering apparatus.) The results are shown in FIG. 6 . It can be seen from the figure that the resistivity is almost proportional until the nitrogen partial pressure is 15% (resistivity value: ~1700μΩcm), and the resistivity increases almost monotonously up to about 20% nitrogen partial pressure. Due to such a relationship, the nitrogen partial pressure has a large variation tolerance with respect to the resistivity, and it can be seen that it is a very good material in consideration of production stability during mass production.

[0120] Although the...

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PUM

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Abstract

The invention provides a heat generating resistant element having a high durability and a high resistance suitable for constituting an electrothermal converting member in an ink jet head or an ink jet apparatus. There is employed, as the heat generating resistant element, a film constituted of Cr, Si and N, having a composition of Cr: 15 to 20 at. %, Si: 40 to 60 at. % and N: 20 to 45 at. %, which constitute 100 at.% or substantially 100 at. %.

Description

technical field [0001] The present invention relates to an inkjet device suitable for recording and printing characters, symbols, images, etc. A heating resistor film of an electrothermal transducer of a thermal energy generating unit for use; a substrate for an inkjet head having an electrothermal transducer using the heating resistor film; and an inkjet device; and their manufacturing methods. Background technique [0002] The inkjet device has such characteristics: the functional liquid (hereinafter collectively referred to as "ink") for recording etc. is ejected from the ejection port onto the recording medium to record characters, symbols, images, etc., and has the ability to include ink in the ink. High-speed recording of high-definition images can be performed by ejecting the ink as micro-droplets from the ejection port at a high speed due to the structure imparted to various surfaces by the composition of the ink. In particular, an electrothermal transducer is used ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B41J2/05B41J2/14B41J2/16
CPCB41J2/1604B41J2/1646B41J2/14129B41J2/1642B41J2/1631B41J2/1603B41J2/05
Inventor 铃木博幸早川幸宏川崎喜范齐藤一郎横山宇坂井稔康
Owner CANON KK
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