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Arm mechanism of robot

A technology of robot arm and operating mechanism, which is applied in the direction of manipulators, mechanical equipment, conveyor objects, etc., and can solve problems such as high cost, complicated mechanism, and long connecting rod

Inactive Publication Date: 2008-06-25
TEIJIN SEIKI CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] The rotation angle of the robot arm in the above-mentioned second known conventional robot arm mechanism is limited: because the motor used to extend and retract the robot arm must be placed away from the axis of rotation of the turntable and rotate around the axis
In order to avoid the above limitations, the cost is high and the mechanism is complicated due to the need to add an electrical contact mechanism such as a brush
[0009] The above-mentioned third known conventional robot arm mechanism has the problem that the rhombic linkage moves the clamping member away from the axis of rotation, thus it is necessary to equip a long linkage
The link is too long and may interfere with other elements of the robot arm

Method used

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Embodiment Construction

[0035] In the following detailed description, like reference numerals and symbols refer to like components throughout the drawings.

[0036] see figure 1 -4, the figure shows the first embodiment of the robot arm mechanism of the present invention, figure 1 The robot arm mechanism 200 shown in -4 has first and second grippers 214 and 215 respectively supporting and gripping an object.

[0037] The first and second holding members 214 and 215 should be designed, for example, to facilitate holding and releasing wafers or other materials used to manufacture semiconductor parts. First and second clamping members 214 and 215 have first and second end portions respectively, and are made respectively at the first end portion place of second clamping member 214,215 and are designed to be suitable for receiving and releasing described material. The slots 212, 213. The structures of the first and second clamping pieces 214 and 215 depend on the shape and size of the material clamped ...

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Abstract

A robot arm mechanism includes a handling member for supporting and handling an object, a robot arm made up of a plurality of links, and a robot arm driving mechanism for driving the robot arm to assume its contracted and extended position. The robot arm comprises first and second arm links, a link retaining mechanism pivotably retaining the first and second arm links and a link operating mechanism to operate one of the first and second arm links by a motion of the other of the first and second arm links. The link operating mechanism comprises a crank, a coupling link and a connecting link. The crank integrally connected to the coupling link is pivotably connected to one of the first and second arms and to the link retaining mechanism. The connecting link is pivotably connected to the other of the first and second arms. This leads to the advantage that the robot arms can be contracted and extended and rotated by only two electric motors.

Description

technical field [0001] The present invention relates to a robotic arm mechanism having a telescoping arm, and more particularly to a robotic arm mechanism cooperating with a drive mechanism for bringing the robotic arm to its extended and retracted position. Background technique [0002] Such robotic arm mechanisms are used in semiconductor manufacturing processes. During the manufacturing process, the arm mechanism is operated such that the arm expands and contracts to handle the object, that is, the object to be processed. These items may include, for example, wafers or other precision parts, which are conveyed and placed on a table by a robotic arm. [0003] For example, such a robot arm mechanism has been disclosed in Japanese Patent No. 2808826, which has a hand part for holding and releasing related objects, and a robot arm for manipulating and moving the hand part. The robot arm is composed of a plurality of parallel links having a pivotable joint portion on which a...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B25J9/06B25J9/10H01L21/677H01L21/687
CPCH01L21/68707B25J9/1065Y10T74/20329Y10T74/20305Y10T74/20317B25J9/06
Inventor 奥野长平森弘树渡边彻也
Owner TEIJIN SEIKI CO LTD
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