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Microlens substrate, method of manufacturing a microlens substrate and application of same

A manufacturing method and microlens technology, which can be used in applications, lenses, and other household appliances, etc., can solve problems such as pollution, complicated manufacturing processes, and easy deformation.

Inactive Publication Date: 2008-09-17
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] However, in this technique, processes such as aligning the cover glass or polishing the cover glass to form an optimum optical path length are required, making the manufacturing process complicated.
Moreover, when grinding the cover glass, there is a risk of contamination due to grinding.
As a result, an excessive washing process is required, making the manufacturing process more complicated, and at the same time, there is a problem that the manufacturing cost increases.
In addition, the complexity of the production process will become the main cause of low quality, and the yield may decrease
In particular, in the 2P method, since the microlens substrate is formed by using three components: a resin layer made of a photocurable resin, a cover glass, and a substrate with recesses, deformation is likely to occur due to a difference in thermal expansion coefficient. , as a result, there is a possibility that characteristics such as optical characteristics may be easily deteriorated

Method used

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  • Microlens substrate, method of manufacturing a microlens substrate and application of same
  • Microlens substrate, method of manufacturing a microlens substrate and application of same
  • Microlens substrate, method of manufacturing a microlens substrate and application of same

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no. 1 Embodiment approach

[0067] Next, a first embodiment of a method for manufacturing a microlens substrate according to the present invention will be described with reference to the drawings.

[0068] The manufacturing method of the microlens substrate of the present invention includes a pressure-bonding step of pressure-bonding the above-mentioned substrate with recesses and a substrate mainly composed of a resin material in a heated state.

[0069] (Manufacturing of substrates with recesses)

[0070] First, an example of a method of manufacturing a substrate with recesses constituting the microlens substrate of the present invention will be described with reference to the drawings.

[0071] First, a glass substrate 5 is prepared.

[0072] As the glass substrate 5, it is preferable to use a substrate having a uniform thickness and free from warps and flaws. Furthermore, the glass substrate 5 is preferably a substrate whose surface has been cleaned by washing or the like.

[0073] Examples of the...

no. 2 Embodiment approach

[0130] Next, a second embodiment of the manufacturing method of the microlens substrate of the present invention will be described. In addition, in the following description, the part which differs from the said 1st Embodiment is demonstrated emphatically, and the description of the same part is abbreviate|omitted.

[0131] Figure 4 It is a schematic longitudinal sectional view showing the second embodiment of the method of manufacturing the microlens substrate of the present invention.

[0132] In the bonding process of the present embodiment, the substrate with recesses 101 and the resin substrate (base material) 102' mainly composed of a thermosetting resin in an incompletely cured state are pressure-bonded while being heated. That is, the microlens substrate 10 is manufactured in the same manner as in the above-mentioned embodiment except that a thermosetting resin in a state of not being completely cured is used as the resin material constituting the resin substrate 102'....

Embodiment 1

[0211] As described below, a microlens substrate with recesses having a plurality of recesses was manufactured, and a microlens substrate was manufactured using this substrate with recesses for microlenses.

[0212] (Formation process of substrate with recessed part)

[0213] First, a quartz glass substrate (refractive index: 1.46) having a thickness of 1.2 mm was prepared as a glass substrate.

[0214] The surface of the quartz glass substrate was washed by immersing it in a cleaning solution (80% sulfuric acid + 20% hydrogen peroxide) heated to 85°C.

[0215] Next, a 0.03 μm thick Cr film was formed on the quartz glass substrate by a sputtering method. That is, a Cr film mask and a back protective film were formed on the surface of the quartz glass substrate.

[0216] Next, laser processing is performed on the mask to form a plurality of initial holes (refer to figure 2 (b)).

[0217] In addition, the laser processing is by using YAG laser, the energy intensity is 1mW, t...

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Abstract

The invention discloses a preparing method of microscopic base with multiple microscopes, which comprises the following steps: bonding fluted base and base material under heating condition; possessing multiple flutes on the surface of fluted base corresponding to microscope; filling resin material in the flute to bond the fluted base and base material. The absolute value of refractivity difference between fluted base and resin material is over 0.01. The bonding operation is preceded under pressure-reducing environment.

Description

technical field [0001] The present invention relates to a manufacturing method of a microlens substrate, a microlens substrate, a counter substrate for a liquid crystal panel, a liquid crystal panel, and a projection display device. Background technique [0002] There is known a projection display device that projects an image on a screen. [0003] In such a projection display device, a liquid crystal panel (liquid crystal shutter) is mainly used for image formation. [0004] The liquid crystal panel is, for example, formed by bonding a liquid crystal drive substrate (TFT substrate) and a counter substrate for a liquid crystal panel via a liquid crystal layer. The liquid crystal drive substrate has a thin film transistor (TFT) and a pixel electrode for controlling each pixel; The counter substrate for a panel has a black matrix, a common electrode, and the like. [0005] In the liquid crystal panel (TFT liquid crystal panel) having such a structure, since the black matrix ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B3/00G02F1/13B29D11/00H04N5/74
Inventor 宫尾信之田中光丰
Owner SEIKO EPSON CORP