Thin film transistor array base board and its repairing method
A technology for thin film transistors and array substrates, which is applied in the field of thin film transistor array substrates and their repairs, can solve problems such as inability to repair, and achieves the effects of not affecting the aperture ratio, and being convenient and simple to repair.
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Embodiment 1
[0035] figure 2 It is a schematic structural diagram of a TFT substrate according to Embodiment 1 of the present invention.
[0036] refer to figure 2 , Figure 5A The thin film transistor array substrate includes a plurality of gate scanning lines 20 extending along a first direction; a plurality of data lines 30 extending along a second direction, the gate scanning lines 20 and the data lines 30 intersect to form a pixel area; Thin film transistor 31 and pixel electrode 40, thin film transistor 31 is made up of gate 311, source 312 and drain 313, gate 311 is electrically connected with gate scanning line 20, drain 313 is electrically connected with data line 30, source 312 Connect with the pixel electrode 40 through the contact hole 41, the gate 311 is formed on the first metal layer, the source 312 and the drain are formed on the second metal layer, there is a SiNx insulating layer 25 between the two layers to separate, the source 312 and the drain 313 are symmetricall...
Embodiment 2
[0042] image 3 It is a schematic structural diagram of a TFT substrate according to Embodiment 2 of the present invention.
[0043] refer to image 3 Different from the structure of the thin film transistor array substrate provided in Embodiment 1, there is no second protrusion 22b on the upper end of the outer shielding line 22 in this embodiment, and the repair line 32 is formed on the pixel electrode layer. The repair line 32 and the first The overlapping intersecting interlayer of the repair pad 23 and the outer shielding line 22 is further provided with a second repair pad 33 a and a third repair pad 33 b formed on the same metal layer (second metal layer) as the data line 30 .
[0044] Figure 8 It is a schematic diagram of repairing the short circuit at the junction of the data line and the gate scanning line by using Embodiment 2 of the present invention; Figure 9A with 9B Respectively, front and back edges Figure 8 Schematic cross-sectional view of IV-IV direc...
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