Thin film transistor array base board and its repairing method
A technology for thin film transistors and array substrates, which is applied in the field of thin film transistor array substrates and their repairs, can solve problems such as inability to repair, and achieves the effects of not affecting the aperture ratio and being convenient and simple to repair.
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Embodiment 1
[0034] FIG. 2 is a schematic structural diagram of a TFT substrate according to Embodiment 1 of the present invention.
[0035] 2 and 5A, the thin film transistor array substrate includes a plurality of gate scanning lines 20 extending along the first direction; a plurality of data lines 30 extending along the second direction, and the gate scanning lines 20 and data lines 30 intersect to form pixels region; a thin film transistor 31 and a pixel electrode 40 are arranged in the pixel region, the thin film transistor 31 is composed of a gate 311, a source 312 and a drain 313, the gate 311 is electrically connected to the gate scanning line 20, and the drain 313 is connected to the data line 30 Electrically connected, the source electrode 312 is connected to the pixel electrode 40 through the contact hole 41, the gate electrode 311 is formed on the first metal layer, the source electrode 312 and the drain electrode are formed on the second metal layer, and there is a SiNx insulat...
Embodiment 2
[0041] FIG. 3 is a schematic structural diagram of a TFT substrate according to Embodiment 2 of the present invention.
[0042] Referring to FIG. 3 , the difference from the structure of the thin film transistor array substrate provided in Embodiment 1 is that there is no protrusion 22b on the upper end of the outer shielding line 22 in this embodiment, and the repair line 32 is formed on the pixel electrode layer. The repair line 32 and the repair line The overlapping intersecting interlayers of the pads 23 and the outer shielding lines 22 are also respectively provided with repair pads 33 a and 33 b formed on the same metal layer (second metal layer) as the data lines 30 .
[0043] 8 is a schematic diagram of repairing the short circuit at the junction of the data line and the gate scanning line according to Embodiment 2 of the present invention; FIGS. 9A and 9B are respectively schematic cross-sectional views along the IV-IV direction of FIG. 8 before and after the repair; F...
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