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Levelling equipment for vacuum chamber

A technology of leveling device and vacuum chamber, applied in the field of leveling device, can solve problems such as affecting production scheduling, occupying cranes, etc., and achieve the effects of improving production efficiency, speeding up adjustment time, and simple structure

Inactive Publication Date: 2009-02-18
WISDRI ENG & RES INC LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] When adjusting the gasket set, the vacuum chamber needs to be hoisted by a crane, and then the thickness of the gasket is selected and the gasket is increased or decreased. These operations will occupy the crane, which will greatly affect the production scheduling

Method used

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  • Levelling equipment for vacuum chamber
  • Levelling equipment for vacuum chamber
  • Levelling equipment for vacuum chamber

Examples

Experimental program
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Effect test

Embodiment Construction

[0015] Such as figure 1 , figure 2 As shown, the vacuum chamber leveling device includes a box body 5, a thrust bearing 6, a worm wheel 7, a bushing 8, a guide cover 9, a screw pillar 10, a limit block 11, a sliding bearing 12, a worm 13, and a stuffy cover 14 , Through the cover 15, the box body 5 is a cavity, the upper end of the box body 5 is an opening, the guide cover 9 is provided with a guide hole, the bottom of the screw pillar 10 passes through the guide hole on the guide cover 9 and is positioned at the bottom of the box body 5 In the cavity, the thrust bearing 6 and the worm wheel 7 are respectively located in the cavity of the box body 5, the worm wheel 7 is located above the thrust bearing 6, the lower end of the worm wheel 7 is fixedly connected with the box body 5 by the thrust bearing 6, and the screw strut 10 is provided with an external thread, and the worm wheel 7 is provided with an internal thread hole, and the screw strut 10 is screwed into the internal...

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Abstract

This invention relates to a leveling device for vacuum chamber, which comprises a housing, a pneumatic thrust bearing, a worm gear, a guide cover, a screw prop, and a worm rod. The lower part of the screw prop runs through the guide hole in the guide cover, and is in the chamber of the housing. The lower end of the worm gear is connected with the housing via the pneumatic thrust bearing. The screw prop has external threads, and is locked in the internal threads of the worm gear. The lower end of the screw prop runs through the screw prop hole in the pneumatic thrust bearing. The worm rod and the worm gear are meshed. Both ends of the worm rod are connected with the housing via bearings. One end of the worm rod is connected with the hand wheel or the output axis of the speed reduction motor. The guide cover and the housing are fixing-connected. The leveling device has such advantages as high production efficiency and simple structure, and can level with load.

Description

technical field [0001] The invention relates to a leveling device for adjusting the height and flatness of the top surface of a vacuum chamber and the alloy material mouth surface of the vacuum chamber in RH vacuum treatment. Background technique [0002] In the engineering design of RH vacuum treatment, 2 to 4 vacuum chamber trolleys and 5 to 8 vacuum chambers are often configured, and each vacuum chamber is often equipped with 3 to 4 outriggers. The vacuum chamber is seated on the vacuum chamber trolley through outriggers, and all vacuum chambers are required to be interchangeable in all vacuum chamber trolleys. In order to achieve interchangeability and solve the differences between individual devices, and to compensate for the size error between different legs of the same vacuum chamber, an adjustment gasket set is set up in the vacuum chamber leg and vacuum chamber platform workshop. In actual use, it is found that the height and flatness of the top surface of the vacu...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C21C7/10
Inventor 盛正平胡雪萍孙毅张愉盛汉桥张文张钟蓓许海虹
Owner WISDRI ENG & RES INC LTD
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