Three-phase heating system with abnormal detecting function and its detecting method

A heating system and abnormality detection technology, applied in the direction of electric heating devices, emergency protection devices for automatic disconnection, electrical components, etc., can solve problems such as the influence of heating manufacturing process conditions, non-compliance, and increased production costs

Inactive Publication Date: 2009-02-18
AU OPTRONICS CORP
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, since there is no device for detecting abnormal faults of the relays 210 in the system, when one of the three relays 210 is damaged, a phase loss will occur in the three-phase balance state, which will affect the heating and manufacturing process conditions
At this time, when the operator cannot detect the abnormality in real time, the product after the heating manufacturing process does not meet the original expected standard, which also indirectly increases the production cost

Method used

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  • Three-phase heating system with abnormal detecting function and its detecting method
  • Three-phase heating system with abnormal detecting function and its detecting method
  • Three-phase heating system with abnormal detecting function and its detecting method

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Embodiment Construction

[0025] Please refer to image 3 , is a schematic block diagram illustrating a three-phase heating system with an abnormality detection function according to an embodiment of the present invention. In the three-phase heating system 300 , the three-phase power supply 310 is used to input a voltage source to the relay 320 for the relay 320 to operate. The relay 320 is used to control the heater 330 to be turned on or off, and to heat the furnace 340 through the heater 330 . The heating furnace 340 is detected by the temperature detector 350, and then the detected temperature signal is transmitted to the temperature controller 360 through the temperature detector 350, and the temperature controller 360 controls the relay 320, so that the relay 320 controls the heater 330 The opening or closing of , and then maintain the temperature condition in the heating furnace 340. In addition, the three-phase heating system 300 also has a detection circuit for detecting whether the relay 32...

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Abstract

The system includes relays and detection device. The relays are in use for turning on / off of heater in control system. Being connected to relays electrically, the detection device is in use for detecting whether there is abnormal state in relays. The detection device includes electrical contacts and diverter switches. Relay is connected to at least one electrical contact electrically, and diverter switch is connected to at least one electrical contact electrically. When detection device has detected that one relay is in abnormal condition, the diverter switch is triggered, and outputs detection signal to inform that abnormal condition occurs. The invention also discloses method for detecting abnormal condition of three phases heating system. The invention lets operator know abnormal condition of system expediently and quickly and carry out rehabilitation work in real time.

Description

technical field [0001] The present invention relates to a three-phase heating system with anomaly detection function and its detection method, and in particular to a three-phase heating system and its detection method using a relay device for anomaly detection. Background technique [0002] Generally, in semiconductor-related manufacturing process steps, a heating system (such as: three-phase heating system) is usually used for annealing (annea1) manufacturing process to remove moisture or impurities and make the product itself have better physical properties. characteristic. Please refer to figure 1 , is a schematic block diagram showing an existing three-phase heating system. The three-phase heating system 100 includes a three-phase power supply 110 , a relay 120 , a heater 130 , a heating furnace 140 , a temperature detector 150 and a temperature controller 160 . The three-phase power supply 110 is used to input a voltage source into the relay 120 for the relay 120 to ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H02H3/247H05B1/00H05B1/02
Inventor 曾振助陈士元王维扬林少陵
Owner AU OPTRONICS CORP
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