Three-phase heating system with abnormal detecting function and its detecting method

Abstract

The system includes relays and detection device. The relays are in use for turning on / off of heater in control system. Being connected to relays electrically, the detection device is in use for detecting whether there is abnormal state in relays. The detection device includes electrical contacts and diverter switches. Relay is connected to at least one electrical contact electrically, and diverter switch is connected to at least one electrical contact electrically. When detection device has detected that one relay is in abnormal condition, the diverter switch is triggered, and outputs detection signal to inform that abnormal condition occurs. The invention also discloses method for detecting abnormal condition of three phases heating system. The invention lets operator know abnormal condition of system expediently and quickly and carry out rehabilitation work in real time.

Description

technical field [0001] The present invention relates to a three-phase heating system with anomaly detection function and its detection method, and in particular to a three-phase heating system and its detection method using a relay device for anomaly detection. Background technique [0002] Generally, in semiconductor-related manufacturing process steps, a heating system (such as: three-phase heating system) is usually used for anneal manufacturing process to remove moisture or impurities and make the product itself have better physical properties . Please refer to FIG. 1 , which is a schematic block diagram of a conventional three-phase heating system. The three-phase heating system 100 includes a three-phase power supply 110 , a relay 120 , a heater 130 , a heating furnace 140 , a temperature detector 150 and a temperature controller 160 . The three-phase power supply 110 is used to input a voltage source into the relay 120 for the relay 120 to operate. The relay 120 is...

AI Technical Summary

Problems solved by technology

However, since there is no device for detecting abnormal faults of the relays 210 in the system, when one of the three relays 210 is damaged, a phase loss will occur in the three-phase balance state, which will affect the heating and manufacturing process conditions

At this time, when the operator cannot detect the abnormality in real time, the product after the heating manufacturing process does not meet the original expected standard, which also indirectly increases the production cost

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